Young's modulus measurements on ultra-thin coatings

Journal of Materials Research

Volumn 19, Issue 1, 2004, Pages 301-314

  Chudoba, T ^a,b   Griepentrog, M ^c   Duck A ^c   Schneider, D ^d   Richter, F ^b  

^a Advanced Surface Mechanics (ASMEC)   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^d FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; MECHANICAL VARIABLES MEASUREMENT; SILICON; SUBSTRATES; SURFACE WAVES; THICKNESS MEASUREMENT; THIN FILMS; TITANIUM NITRIDE; ULTRASONIC WAVES;

FILM THICKNESS; NANOINDENTATION; SURFACE ACOUSTIC WAVE METHOD; TITANIUM NITRIDE COATING; ULTRA THIN COATINGS; ULTRASONIC SURFACE WAVES;

INDENTATION;

EID: 4444288484     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2004.19.1.301     Document Type: Article

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