A simple method for evaluating elastic modulus of thin films by nanoindentation

Journal of Materials Research

Volumn 24, Issue 3, 2009, Pages 801-815

  Wei, Zhongxin ^a   Zhang, Guoping ^a   Chen, Hao ^b   Luo, Jian ^b   Liu, Ranran ^a   Guo, Shengmin ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

^b South   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FILM THICKNESS; NANOINDENTATION; SUBSTRATES;

COMPOSITE MODULUS; DESIGN EXPERIMENTS; ELASTIC PROPERTIES; FILM SUBSTRATES; INDENTATION DEPTH; NANOINDENTATION EXPERIMENTS; SIMPLE EMPIRICAL METHODS; STATISTICAL ESTIMATION;

THIN FILMS;

EID: 63149117409     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2009.0126     Document Type: Article

References (41)

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