Measuring substrate-independent modulus of dielectric films by instrumented indentation

Journal of Materials Research

Volumn 24, Issue 3, 2009, Pages 667-677

  Hay, Jennifer ^a  

^a AGILENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMON PROBLEMS; FILM-SUBSTRATE SYSTEMS; FINITE-ELEMENT ANALYSIS; INSTRUMENTED INDENTATIONS; MEASUREMENT UNCERTAINTIES; THIN DIELECTRIC FILMS;

AD HOC NETWORKS; DIELECTRIC DEVICES; DIELECTRIC FILMS; MECHANICAL PROPERTIES; NANOINDENTATION; SEMICONDUCTING SILICON COMPOUNDS; UNCERTAINTY ANALYSIS;

SUBSTRATES;

EID: 63149174899     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2009.0132     Document Type: Article

References (11)

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