Microfabrication issues in constructing freestanding membranes of near-frictionless carbon and diamond-like films

Diamond and Related Materials

Volumn 16, Issue 2, 2007, Pages 342-349

  Zhou, B ^a   Prorok, B C ^a   Erdemir, A ^b   Eryilmaz, O ^b  

^a AUBURN UNIVERSITY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

DLC; Membrane; Micromachining; Near frictionless carbon

Indexed keywords

ATOMIC FORCE MICROSCOPY; FABRICATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SENSORS; THIN FILMS; TRIBOLOGY;

BULK MICROMACHINING ISSUES; MEMS SENSOR DEVICES; MICROFABRICATION; NEAR FRICTIONLESS CARBON;

DIAMOND LIKE CARBON FILMS;

EID: 33846289287     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.06.021     Document Type: Article

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