Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Journal of Materials Research

Volumn 24, Issue 3, 2009, Pages 1114-1126

  Li, Han ^a   Vlassak, Joost J ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK MATERIALS; CONTACT AREAS; CONTACT STIFFNESS; DATA ANALYSIS; ELASTIC SOLUTIONS; ELASTO PLASTICS; HALF SPACES; INDENTATION DEPTHS; INDENTATION LOADS; OLIVER-PHARR METHODS; ULTRA-THIN FILMS;

ELASTIC MODULI; HARDNESS; THIN FILM DEVICES; THIN FILMS;

SUBSTRATES;

EID: 63149131529     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2009.0144     Document Type: Article

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