Determination of elastic modulus of thin layers using nanoindentation

Journal of Materials Research

Volumn 12, Issue 9, 1997, Pages 2475-2484

  Mencik J ^a,c   Munz, D ^a   Quandt, E ^a   Weppelmann, E R ^a   Swain, M V ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b CSIRO   (Australia)

^c UNIVERSITY OF PARDUBICE   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELASTIC MODULI; FUNCTIONS; SUBSTRATES;

NANOINDENTATION;

THIN FILMS;

EID: 0031236255     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0327     Document Type: Article

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