Review of polymer materials with low dielectric constant

Polymer International

Volumn 59, Issue 5, 2010, Pages 597-606

  Zhao, Xiong Yan ^a   Liu, Hong Jie ^b  

^a Hebei University of Science and Technology   (Taiwan)

^b Henkel Huawei Electronics Co Ltd   (Taiwan)

Author keywords

Electronic circuits; Low dielectric constant; Polymeric dielectric materials; Ultralarge scale integration

Indexed keywords

ELECTRONIC CIRCUITS; FLUORINATED POLYMERS; FUTURE DIRECTIONS; LOW DIELECTRIC CONSTANTS; MATERIAL SCIENCE; POLYMER MATERIALS; POLYMERIC DIELECTRICS; POROUS POLYMERS; POTENTIAL APPLICATIONS; SCALE INTEGRATION; SILICON CONTAINING POLYMERS; ULTRALARGE SCALE INTEGRATION;

AROMATIC POLYMERS; PERMITTIVITY; PHOTORESISTS; POLYMERS; POROUS SILICON;

DIELECTRIC MATERIALS;

DIELECTRIC PROPERTY; ELECTRONICS; POLYMER; POROSITY; SYNTHESIS;

EID: 77954474784     PISSN: 09598103     EISSN: 10970126     Source Type: Journal    
DOI: 10.1002/pi.2809     Document Type: Review

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