Electrical, mechanical, and optical properties of the organic-inorganic hybrid-polymer thin films deposited by PECVD

Thin Solid Films

Volumn 516, Issue 11, 2008, Pages 3577-3581

  Bae, I S ^a   Cho, S J ^a   Choi, W S ^a   Hong, B Y ^a   Kim, Y J ^a   Kim, Y M ^b   Boo, J H ^a  

^a Sungkyunkwan University   (South Korea)

^b Chonnam National University   (South Korea)

Author keywords

Hybrid; Low k; PECVD; Polymerization

Indexed keywords

DEPOSITION; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERIZATION; THIN FILMS;

CROSS-LINKED DENSITY; SINGLE MOLECULAR PRECURSORS;

POLYMER FILMS;

EID: 40649098863     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.08.052     Document Type: Article

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