Structure analysis and property improvements of the computer-simulated fullerene-based ultralow-k dielectrics

Microelectronic Engineering

Volumn 85, Issue 10, 2008, Pages 2118-2122

  Zagorodniy, K ^a   Hermann, H ^a   Taut, M ^a   Seifert, G ^b   Zschech, E ^c  

^a IFW DRESDEN   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^c IBM MICROELECTRONICS   (United States)

Author keywords

Fullerenes and fullerene based dielectrics; Interlayer dielectric; Low and ultralow k dielectrics; Molecular design; Nanostructured materials

Indexed keywords

CHLORINE COMPOUNDS; DIELECTRIC PROPERTIES; ERROR ANALYSIS; FULLERENES; MECHANICAL PROPERTIES; MOLECULES; NANOSTRUCTURES;

CHEMICAL-; COMPLEX PROBLEMS; FULLERENE; FULLERENES AND FULLERENE-BASED DIELECTRICS; INTERLAYER DIELECTRIC; LINKER MOLECULES; LOW- AND ULTRALOW-K DIELECTRICS; MOLECULAR DESIGN; MOLECULAR DESIGNS; NANOSTRUCTURED MATERIALS; STRUCTURE ANALYSIS; ULTRA LOW-K; ULTRA-LOW K DIELECTRICS;

DIELECTRIC MATERIALS;

EID: 52349088219     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.05.024     Document Type: Article

References (53)

1. Rhee S.-H., Radwin M.D., Ng M.F., Martin J.I., and Erb D. Appl. Phys. Lett. 83 (2003) 2644
2. Jeng S.-P., Havemann R.H., and Chang M.-C. Mater. Res. Soc. Symp. Proc. 337 (1994) 25
3. ITRS, Semiconductor Industry Association, The International Technology Roadmap for Semiconductors, , 2007.
4. Semiconductor International news, .
5. Miller R.D. Science 286 (1999) 421
6. Zhang J.-Y., and Boyd I.W. Mater. Sci. Semicond. Process. 3 (2000) 345
7. Maex K., Baklanov M.R., Shamiryan D., Iacopi F., Brongersma S.H., and Yanovitskaya Z.S. J. Appl. Phys. 93 (2003) 8793
8. Murarka S.P., Einzenberg M., and Sinha A.H. Interlayer Dielectrics for Semiconductor Technologies (2003), Elsevier Academic Press, Amsterdam
9. Homma T. Mater. Sci. Eng. R23 (1998) 243
10. Hermann H., Elsner A., Hecker M., and Stoyan D. Microelectron. Eng. 81 (2005) 535
11. Jain A., Rogojevic S., Gill W.N., Plawsky J.L., Matthew I., Tomozawa M., and Simonyi E. J. Appl. Phys. 90 (2001) 5832
12. Flannery C.M., Wittkowski T., Jung K., Hillebrands B., and Baklanov M.R. Appl. Phys. Lett. 80 (2002) 4594
13. Miller K.J. J. Am. Chem. Soc. 112 (1990) 8533
14. S. Lin et al., in: Proceedings of the International Interconnect Technology Conference-2001, San Francisco, 2001, IEEE Press, NJ, 2001, p. 146.
15. Miyoshi H., Matsuo H., Oku Y., Tanaka H., Yamada K., Mikami N., Takada S., Hata N., and Kikkawa T. Jpn. J. Appl. Phys. 43 (2004) 498
16. Uera K., Kawahara J., Miyoshi H., Hata N., and Kikkawa T. Jpn. J. Appl. Phys. 43 (2004) 504
17. Townsend P.H., et al. Mater. Res. Soc. Symp. Proc. 476 (1997) 9
18. S. Ogawa, T. Nasuno, M. Egami, A. Nakashima, in: Proceedings of the IEEE International Interconnect Technology Conference-2002, IEEE Press, 2002, p. 220.
19. Q. Han, W. Chen, C. Waldfried, O. Escorcia, N.M. Sbrockey, T.J. Bridgewater, E.S. Moyer, I. Berry, in: Proceedings of IEEE International Interconnect Technology Conference-2001, IEEE Press, 2001, p. 171.
20. Hermann H., Zagorodniy K., Touzik A., Taut M., and Seifert G. Microelectron. Eng. 82 (2005) 387
21. Zagorodniy K., Hermann H., and Taut M. Phys. Rev. B 75 (2007) 245430-245436
22. Zagorodniy K., Hermann H., Taut M., Wang Y., Seifert G., and Zschech E. AIP Conf. Proc. CP945 (2007) 162-169
23. Wang Y., Seifert G., and Hermann H. Phys. State Solid A 203 (2006) 3868
24. Zagorodniy K., Hermann H., and Taut M. Mater. Sci. Pol. 25 (2007) 1203-1211
25. Hirsch A. Adv. Mater. 5 (1993) 859
26. Wang C., Guo Z.-X., Fu S., Wu W., and Zhu D. Prog. Polym. Sci. 29 (2004) 1079
27. Meier M.S. In: Eklund P.C., and Rao A.M. (Eds). Fullerene Polymers and Fullerene Polymer Composites (2000), Springer, Berlin 369
28. Peng H., Lam J.W.Y., Leung F.S.M., Poon T.W.H., Wu A.X., Yu N.-T., and Tang B.Z. J. Sol-Gel Sci. Technol. 22 (2001) 205
29. Goryunkov A.A., Ioffe I.N., Khavrel P.A., Avdoshenko S.M., Markov V.Yu., Mazej Z., Sidorov L.N., and Troyanov S.I. Chem. Commun. 7 (2007) 704-706
30. Shustova N.B., Popov A.A., Sidorov L.N., Turnbull A.P., Kemnitz E., and Troyanov S.I. Chem. Commun. 11 (2005) 1411-1413
31. Kareev I.E., Quiñones G.S., Kuvychko I.V., A Khavrel P., Ioffe I.N., Goldt I.V., Lebedkin S.F., Seppelt K., Strauss S.H., and Boltalina O.V. J. Am. Chem. Soc. 127 (2005) 11497-11504
32. Dorozhkin E.I., Ignat'eva D.V., Tamm N.B., Goryunkov A.A., Khavrel P.A., Ioffe I.N., Popov A.A., Kuvychko I.V., Streletskiy A.V., Markov V.Y., Spandl J., Strauss S.H., and Boltalina O.V. Chem. Eur. J. 12 (2006) 3876-3889
33. Ignat'eva D.V., Goryunkov A.A., Tamm N.B., Ioffe I.N., Avdoshenko S.M., Sidorov L.N., Dimitrov A., Kemnitz E., and Troyanov S.I. Chem. Commun. 16 (2005) 1778-1780
34. Avdoshenko S.M., Goryunkov A.A., Ioffe I.N., Ignat'eva D.V., Sidorov L.N., Pattison P., Kemnitz E., and Troyanov S.I. Chem. Commun. 23 (2006) 2463-2465
35. Pimenova A.S., Kozlov A.A., Goryunkov A.A., Markov V.Yu., Khavrel P.A., Avdoshenko S.M., Vorobiev V.A., Ioffe I.N., Sakharov S.G., Troyanov S.I., and Sidorov L.N. Dalton Trans. 45 (2007) 5322-5328
36. Omelyanyuk N.A., Goryunkov A.A., Tamm N.B., Avdoshenko S.M., Ioffe I.N., Sidorov L.N., Kemnitz E., and Troyanov S.I. Chem. Commun. 45 (2007) 4794-4796
37. Pimenova A.S., Kozlov A.A., Goryunkov A.A., Markov V.Yu., Khavrel P.A., Avdoshenko S.M., Ioffe I.N., Sakharov S.G., Troyanov S.I., and Sidorov L.N. Chem. Commun. 4 (2007) 374-376
38. Kareev I.E., Lebedkin S.F., Miller S.M., Anderson O.P., Strauss S.H., and Boltalina O.V. Acta Cryst. E62 (2006) o620-o622
39. Courtot-Descharles A., Pires F., Paillet P., and Leay J.L. Microelectron. Reliab. 39 (1999) 279
40. Szwacki N.G., Sadrzadeh A., and Yacobson B.I. Phys. Rev. Lett. 98 (2007) 166804
41. Bortel G., Faigel G., Kováts E., Oszlányi G., and Pekker S. Phys. State Solid B 243 (2006) 2999
42. Seifert G., Enyashin A.N., and Heine T. Phys. Rev. B 72 (2005) 012102
43. Enyashin A., Gemming S., Heine T., Seifert G., and Zhechkov L. Phys. Chem. Chem. Phys. 8 (2006) 3320
44. Wu H.-S., Cui X.-Y., Qin X.-F., and Jiao H. J. Mol. Struct. THEOCHEM 714 (2005) 153-155
45. Hirsch A. J. Phys. Chem. Solids 58 (1997) 1729
46. Pichierri F. Physica E 29 (2005) 689
47. HyperChem7.52 .
48. Porezag D., Frauenheim Th., Köhler Th., Seifert G., and Kaschner R. Phys. Rev. B 51 (1995) 12947
49. Seifert G., Porezag D., and Frauenheim T. Int. J. Quantum Chem. 58 (1996) 185
50. Jungnickel G., Porezag D., Frauenheim T., Heggie M.I., Lambrecht W.R.L., Segall B., and Angus J.C. Phys. State Solid A 154 (1996) 109
51. Vanderbilt D. Ferroelectrics 301 (2004) 9
52. Souza I., Iniguez J., and Vanderbilt D. Phys. Rev. B 69 (2004) 085106
53. Souza I., Iniguez J., and Vanderbilt D. Phys. Rev. Lett. 89 (2002) 117602