SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 254, Issue 23, 2008, Pages 7817-7820

A study on electrical and mechanical properties of hybrid-polymer thin films by a controlled TEOS bubbling ratio

(4) Cho, S J a Bae, I S a Jeong, H D b Boo, J H a

a Sungkyunkwan University (South Korea)

b Chonnam National University (South Korea)

Author keywords

Electrical and mechanical properties; low k; Organic inorganic hybrid polymer thin film; PECVD

Indexed keywords

BUBBLE FORMATION; ELASTIC MODULI; HARDNESS; LOW-K DIELECTRIC; MECHANICAL PROPERTIES; ORGANIC-INORGANIC MATERIALS; PHOTOSENSITIVITY; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMER FILMS;

ELECTRICAL AND MECHANICAL PROPERTIES; ETHYLCYCLOHEXANE; HYBRID POLYMER THIN FILMS; IMPEDANCE ANALYZER; INORGANIC PRECURSOR; MEASUREMENTS OF; ORGANIC-INORGANIC HYBRID POLYMER; TEOS (TETRAETHOXYSILANE);

THIN FILMS;

EID: 51249109274 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2008.02.095 Document Type: Article

Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.