Low-dielectric, nanoporous polyimide films prepared from PEO-POSS nanoparticles

Polymer

Volumn 46, Issue 23, 2005, Pages 10056-10065

  Lee, Yuan Jyh ^a   Huang, Jieh Ming ^b   Kuo, Shiao Wei ^a   Chang, Feng Chih ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b Van Nung University   (Taiwan)

Author keywords

Low k materials; Nanoparticles; Polyimide

Indexed keywords

DIELECTRIC FILMS; DIFFUSION; ELECTRIC INSULATORS; NANOSTRUCTURED MATERIALS; PERMITTIVITY; PORE SIZE; SEMICONDUCTOR DEVICES; SILICA;

BLENDING POLYIMIDE; HYBRID FILMS; LOW-K MATERIALS; NANOPARTICLES;

POLYIMIDES;

FILM;

EID: 26844565453     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.polymer.2005.08.047     Document Type: Article

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