Resonator miniaturization for oscillators

2008 IEEE International Frequency Control Symposium, FCS

Volumn , Issue , 2008, Pages 392-395

  Hsu, Wan Thai ^a  

^a Discera Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHY; MICROELECTROMECHANICAL DEVICES; MINIATURE INSTRUMENTS; OXIDE MINERALS; QUARTZ; RESONATORS; SILICON;

ELECTRICAL PARAMETERS; ELECTROMECHANICAL SYSTEMS; QUARTZ CRYSTALS; TEMPERATURE COMPENSATIONS;

ELECTROMECHANICAL DEVICES;

EID: 55649120431     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2008.4623026     Document Type: Conference Paper

References (10)

1. W. -T Hsu, "Low Cost Packages for MEMS Oscillators", Technical Digest, IEEE International Electronic Manufacturing Technology Symposium, San Jose, Oct. 3-5, 2007.
2. W. -T Hsu and Andrew D. Brown "Frequency Trimming for MEMS Resonator Oscillators" Technical Digest, IEEE Frequency Control Symposium, Geneva, June. 2-4, 2007.
3. MEMS Technology 2008, Chapter 7, pp. 210, BP Nikkei, 2008. (In Japanese)
4. C. S. Lam, "An Assessment of the Recent Development of MEMS Oscillators as Compared with Crystal" Technical Digest, Second Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, December 15-17, 2006, Hangzhou, Zhejiang, China.
5. Birch, J.; Marriott, S.P., "Appraisal of the inverted-mesa AT-cut quartz resonator for achieving low-inductance high-Q single-response crystal units", Electronics Letters, Volume 15, Issue 20, September 27 1979, pp. 641-643
6. H. Iwata, "Miniaturized Ultrahigh Frequency Fundamental Quartz Resonators", IEICE Electronics Express, Vol.1, No. 12, 2004, p. 346-351
7. F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, "High frequency micromechanical filters," IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000.
8. M. A. Abdelmoneum, M. U. Demirci, Y.-W. Lin, and C. T.-C. Nguyen, "Location-dependent tuning of vibrating micromechanical resonators via laser trimming," Proceedings, IEEE Int. UFFC, Montreal, Canada, Aug. 24-27, 2004, pp. 272-279.
9. Parzen, B., Design of Crystal and Other Harmonic Oscillators, Wiley, New York, 1983. Chapter 3.
10. F. Stratton et al, "A MEMS Based Quartz Resonator for GHz Applications", 2004 Joint meeting of Ultrasonic, Ferroelectric, and Frequency Control Symposium, Montreal, Canada, Aug. 24-27, 2004, pp. 28-34.