Dual-beam actuation of piezoelectric ALN RF MEMS switches monolithically integrated with ALN contour-mode resonators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 22-25

  Sinha, N ^a   Mahameed, R ^a   Zuo, C ^a   Pisani, M B ^a   Perez, C R ^a   Piazza, G ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; ELECTRIC SWITCHES; III-V SEMICONDUCTORS; MICROSYSTEMS; MONOLITHIC INTEGRATED CIRCUITS; PIEZOELECTRICITY; RESONATORS; SCATTERING PARAMETERS;

ALUMINUM NITRIDE (ALN); CONTOUR-MODE RESONATORS; DEPOSITED FILMS; FAST SWITCHING; LOW ACTUATION VOLTAGE; MONOLITHICALLY INTEGRATED; MULTI FREQUENCY; RF-MEMS SWITCHES;

SOLID-STATE SENSORS;

EID: 70449482259     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.6     Document Type: Conference Paper

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