Gravimetric chemical sensor based on the direct integration of SWNTs on AlN contour-mode MEMS resonators

2008 IEEE International Frequency Control Symposium, FCS

Volumn , Issue , 2008, Pages 443-448

  Rinaldi, Matteo ^a   Zuniga, Chiara ^a   Sinha, Nipun ^a   Taheri, Marzie ^a   Piazza, Gianluca ^a   Khamis, Samuel M ^b   Johnson, A T ^b  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; ORGANIC CHEMICALS; ORGANIC COMPOUNDS; RESONANCE; RESONATORS; SENSORS; SINGLE-WALLED CARBON NANOTUBES (SWCN); VOLATILE ORGANIC COMPOUNDS;

DIRECT INTEGRATIONS; MASS SENSITIVITIES; MEMS RESONATORS; MICRO ELECTRO MECHANICALS; RESONANCE FREQUENCIES; SINGLE WALL CARBON NANOTUBES; VOLATILE ORGANIC CHEMICALS;

CHEMICAL VAPOR DEPOSITION;

EID: 55649106148     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2008.4623036     Document Type: Conference Paper

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