Low noise silicon micromechanical bulk acoustic wave oscillator

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2005, Pages 1299-1302

  Kaajakari, Ville ^a   Rantakari, Pekka ^b   Koskinen, Jukka K ^a   Mattila, Tomi ^a   Kiihamäki, Jyrki ^a   Koskenvuori, Mika ^b   Tittonen, Ilkka ^b   Oja, Aarne ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRIC POWER UTILIZATION; MICROMACHINING; SILICON;

INTEGRATED ELECTRONICS; MICROMECHANICAL RESONATORS; NOISE ALIASING;

OSCILLATORS (ELECTRONIC);

EID: 33847161147     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603091     Document Type: Conference Paper

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