A MEMS resonant strain sensor with 33 nano-strain resolution in a 10 kHz bandwidth

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 947-950

  Wojciechowski, K E ^a   Boser, B E ^a   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; RESONANCE; STRAIN MEASUREMENT; SURFACE MOUNT TECHNOLOGY; TUNING;

DISPLACEMENT RESOLUTION; DOUBLE ENDED TUNING FORK (DETF); RESONANT STRAIN SENSORS; SURFACE MOUNT ELECTRONICS;

OPTICAL SENSORS;

EID: 33847249467     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597857     Document Type: Conference Paper

References (6)

1. J. A. Geen, S. J. Sherman, J. F. Chang, and S. R. Lewis, "Single-chip surface micromachined integrated gyroscope with 50 deg/hr Allan deviation," Solid-State Circuits, IEEE Journal of, vol. 37, pp. 1860-1866, 2002.
2. K. E. Wojciechowski, B. E. Boser, and A. P. Pisano, "A MEMS resonant strain sensor operated in air," 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, pp.841-5, 2004.
3. A. A. Seshia, M. Palaniapan, T. A. Roessig, R. T. Howe, R. W. Gooch, T. R. Schimert, and S. Montague, "A vacuum packaged surface micromachined resonant accelerometer", Journal of Microelectromechanical Systems, vol. 11, pp. 784-93, 2002.
4. M. Offenberg, M. Illing, M. Schöfthaler, R. Schellin, and D. Ullmann, "Sensor Portfolio for Automotive Applications based on Surface Micro-Machining with Thick Polysilicon", Sensor 99 Proceedings II P 1.10, p. 293, 1999.
5. I. Galton, W. Huff, P. Carbone,and E. Siragusa, "A delta-sigma PLL for 14-b, 50 kSample/s frequency-to-digital conversion of a 10 MHz FM signal", IEEE Journal of Solid-State Circuits, Vol.33, Iss.12, pp.2042-2053, 1998.
6. V. P. Petkov and B. E. Boser, "A fourth-order ΣΔ interface for micromachined inertial sensors". IEEE Journal of Solid-State Circuits, Vol.40, pp. 1602-1609, 2005.