Experimental study of phase noise in FBAR resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 11, 2006, Pages 1982-1987

  Gribaldo, Sébastien ^b   Chay, Cyril ^b   Tournier, Éric ^b,c   Llopis, Olivier ^a,b  

^a IEEE

^b LAAS CNRS   (France)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; DEGRADATION; MEASUREMENT THEORY; MICROMACHINING; Q FACTOR MEASUREMENT;

APODIZED RESONATORS; PHASE NOISE; RESONATOR GEOMETRY; RESONATOR ON WAFER;

ACOUSTIC RESONATORS;

EID: 33846185869     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.138     Document Type: Article

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