Amplitude noise induced phase noise in electrostatic mems resonators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 90-93

  Agarwal, Manu ^a   Park, Kwan K ^a   Kim, Bongsang ^a   Hopcroft, Matthew A ^a   Chandorkar, Saurabh A ^a   Candler, Rob N ^a,b   Jha, Chandra M ^a   Melamud, Renata ^a   Kenny, Thomas W ^a   Murmann, Boris ^a  

^a STANFORD UNIVERSITY   (United States)

^b Bosch Research   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CRYSTAL RESONATORS; CRYSTAL STRUCTURE; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PHASE NOISE; QUARTZ; RESONATORS;

AMPLITUDE FLUCTUATIONS; AMPLITUDE FREQUENCY; AMPLITUDE PERTURBATION; DOUBLE-ENDED TUNING FORKS; ELECTROSTATIC MEMS; FREQUENCY INSTABILITIES; ORDERS OF MAGNITUDE; QUARTZ CRYSTAL RESONATOR;

SOLID-STATE SENSORS;

EID: 84963497245     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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