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Volumn , Issue , 2008, Pages 240-249

Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references

Author keywords

Aluminum nitride; Frequency reference; Lamb waves; Temperature compensation; Zero TCP

Indexed keywords

ALUMINUM NITRIDE; FREQUENCY REFERENCE; LAMB WAVES; TEMPERATURE COMPENSATION; ZERO TCP;

EID: 55649122550     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2008.4622998     Document Type: Conference Paper
Times cited : (91)

References (28)
  • 1
    • 0016951788 scopus 로고
    • Surface Acoustic Waves and SAW Material
    • A. J. Slobodnik, "Surface Acoustic Waves and SAW Material", Proc. IEEE, vol. 64, no. 5, 1976, pp. 581-595.
    • (1976) Proc. IEEE , vol.64 , Issue.5 , pp. 581-595
    • Slobodnik, A.J.1
  • 2
    • 7244239515 scopus 로고    scopus 로고
    • Nonlinear Limits for Single-Crystal Silicon Microresonators
    • V. Kaajakari, T. Mattila, A. Oja, H. Seppä, "Nonlinear Limits for Single-Crystal Silicon Microresonators", J. MEMS, vol. 13, no. 5, 2004, pp. 715-724.
    • (2004) J. MEMS , vol.13 , Issue.5 , pp. 715-724
    • Kaajakari, V.1    Mattila, T.2    Oja, A.3    Seppä, H.4
  • 7
    • 55649090336 scopus 로고    scopus 로고
    • Comparative Analysis of MEMS, Programmable and Synthesized Frequency Control Devices versus Traditional Quartz based Devices
    • in press
    • D. Kenny, R. Henry, "Comparative Analysis of MEMS, Programmable and Synthesized Frequency Control Devices versus Traditional Quartz based Devices", Proc. IEEE Freq. Contr. Symp. 2008, in press.
    • (2008) Proc. IEEE Freq. Contr. Symp
    • Kenny, D.1    Henry, R.2
  • 8
    • 33748757389 scopus 로고    scopus 로고
    • Surface Micromachined AlN Thin Film 2 GHz Resonator for CMOS Integration
    • M. Hara, J. Kuypers, T. Abe and M. Esashi, "Surface Micromachined AlN Thin Film 2 GHz Resonator for CMOS Integration", Sensors and Actuators, A 117 (2005), pp. 211-216.
    • (2005) Sensors and Actuators, A , vol.117 , pp. 211-216
    • Hara, M.1    Kuypers, J.2    Abe, T.3    Esashi, M.4
  • 9
    • 55649084407 scopus 로고    scopus 로고
    • Above-IC Integration of BAW Resonators and Filters for Communication Applications
    • M.-A. Dubois, "Above-IC Integration of BAW Resonators and Filters for Communication Applications", 3rd Int. Symp. Acou. Wave Dev. Fut. Mob. Comm. Sys., 2007, pp. 111-115.
    • (2007) 3rd Int. Symp. Acou. Wave Dev. Fut. Mob. Comm. Sys , pp. 111-115
    • Dubois, M.-A.1
  • 12
    • 0015066005 scopus 로고
    • Temperature Dependence of the Elastic, Piezoelectric, and Dielectric Constants of Lithium Tantalate and Lithium Niobate
    • R. T. Smith, and F. S. Welsh, "Temperature Dependence of the Elastic, Piezoelectric, and Dielectric Constants of Lithium Tantalate and Lithium Niobate", J. Appl. Phys., vol. 42, no. 6, 1971, pp. 2219-2230.
    • (1971) J. Appl. Phys , vol.42 , Issue.6 , pp. 2219-2230
    • Smith, R.T.1    Welsh, F.S.2
  • 13
    • 0019876183 scopus 로고
    • 2 Diaphragm Composite Resonator on a Silicon Wafer
    • 2 Diaphragm Composite Resonator on a Silicon Wafer", Electr. Lett., vol. 17, no. 14,1981, pp. 507-509.
    • (1981) Electr. Lett , vol.17 , Issue.14 , pp. 507-509
    • Nakamura, K.1    Sasaki, H.2    Shimizu, H.3
  • 14
    • 4143049025 scopus 로고    scopus 로고
    • Temperature Characteristics of Solidly Mounted Piezoelectric Thin Film Resonators
    • S. Ohta, K. Nakamura, A. Doi, Y. Ishida, "Temperature Characteristics of Solidly Mounted Piezoelectric Thin Film Resonators", Proc. IEEE Ultrason. Symp. 2003, pp. 2011-2015.
    • (2003) Proc. IEEE Ultrason. Symp , pp. 2011-2015
    • Ohta, S.1    Nakamura, K.2    Doi, A.3    Ishida, Y.4
  • 15
    • 0022115013 scopus 로고
    • Zero-TemperatureCoefficient SAW Devices on AlN Epitaxial Films
    • K. Tsubouchi and N. Mikoshiba, "Zero-TemperatureCoefficient SAW Devices on AlN Epitaxial Films", IEEE Trans. Son. Ultrason., su-32, no. 5, pp. 634-644,1985.
    • (1985) IEEE Trans. Son. Ultrason., su-32 , vol.5 , pp. 634-644
    • Tsubouchi, K.1    Mikoshiba, N.2
  • 17
    • 0020902367 scopus 로고
    • Propagation and Electromechanical Coupling to Plate Modes in Piezoelectric Composite Membranes
    • A. A. Nassar and E.L.Adler, "Propagation and Electromechanical Coupling to Plate Modes in Piezoelectric Composite Membranes", Proc. Ultras. Symp. 1983, pp. 369-372.
    • (1983) Proc. Ultras. Symp , pp. 369-372
    • Nassar, A.A.1    Adler, E.L.2
  • 18
    • 55649121654 scopus 로고
    • Excitation of Surface Waves with Piezoelectric Layers
    • Ph.D. Thesis submitted to the Graduate Faculty, McGill University, Montreal, Quebec, Canada
    • A. A. Nassar, "Excitation of Surface Waves with Piezoelectric Layers", Ph.D. Thesis submitted to the Graduate Faculty, McGill University, Montreal, Quebec, Canada, 1983.
    • (1983)
    • Nassar, A.A.1
  • 19
    • 78649352796 scopus 로고    scopus 로고
    • GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators
    • P. J. Stephanou and A P. Pisano, "GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators", Proc. IEEE Ultrason. Symp. 2006, pp. 2401-2404.
    • (2006) Proc. IEEE Ultrason. Symp , pp. 2401-2404
    • Stephanou, P.J.1    Pisano, A.P.2
  • 20
    • 33846273063 scopus 로고    scopus 로고
    • Micromachined Thin Film Plate Acoustic Resonators Utilizing the Lowest Order Symmetric Lamb Wave Mode
    • V. Yantchev and I. Katardjiev, "Micromachined Thin Film Plate Acoustic Resonators Utilizing the Lowest Order Symmetric Lamb Wave Mode", IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 1, 2007, pp. 87-95.
    • (2007) IEEE Trans. Ultrason., Ferroelect., Freq. Contr , vol.54 , Issue.1 , pp. 87-95
    • Yantchev, V.1    Katardjiev, I.2
  • 21
    • 0000372983 scopus 로고
    • Propagation of Ultrasonic Lamb Waves in Piezoelectric Plates
    • S. G. Joshi and Y. Jin, "Propagation of Ultrasonic Lamb Waves in Piezoelectric Plates", J. Appl. Phys, vol. 70, no. 8,1991, pp. 4113-4120.
    • (1991) J. Appl. Phys , vol.70 , Issue.8 , pp. 4113-4120
    • Joshi, S.G.1    Jin, Y.2
  • 23
    • 0027227257 scopus 로고
    • Electromechanical Coupling Coefficients of Ultrasonic Lamb Waves
    • S. G. Joshi, Y. Jin, "Electromechanical Coupling Coefficients of Ultrasonic Lamb Waves", J. Acoust. Soc. Am., vol. 94, no. 1, 1993, pp. 261-267.
    • (1993) J. Acoust. Soc. Am , vol.94 , Issue.1 , pp. 261-267
    • Joshi, S.G.1    Jin, Y.2
  • 24
    • 48149091621 scopus 로고    scopus 로고
    • Bringing BAW Technology into Volume Production: The Ten Commandments and the Seven Deadly Sins
    • R. Aigner, "Bringing BAW Technology into Volume Production: The Ten Commandments and the Seven Deadly Sins", Int. Symp. on Acous. Wave Dev. for Fut. Mob. Comm., 2007, pp. 85-91.
    • (2007) Int. Symp. on Acous. Wave Dev. for Fut. Mob. Comm , pp. 85-91
    • Aigner, R.1
  • 25
    • 3743066798 scopus 로고
    • Propagation of Acoustic Surface Waves in Multilayers: A Matrix Description
    • A. H. Fahmy, E. L. Adler, "Propagation of Acoustic Surface Waves in Multilayers: A Matrix Description", Appl. Phys. Lett., vol. 22, no. 10, 1973, pp. 495-497.
    • (1973) Appl. Phys. Lett , vol.22 , Issue.10 , pp. 495-497
    • Fahmy, A.H.1    Adler, E.L.2
  • 26
    • 0005347156 scopus 로고
    • Temperature Dependence of the Elastic Constants of Molybdenum
    • J. M. Dickinson and P. E. Armstrong, "Temperature Dependence of the Elastic Constants of Molybdenum", J. Appl. Phys., vol. 38, no. 2, 1967, pp. 602-606.
    • (1967) J. Appl. Phys , vol.38 , Issue.2 , pp. 602-606
    • Dickinson, J.M.1    Armstrong, P.E.2
  • 27
    • 0004274609 scopus 로고    scopus 로고
    • Kluwer Boston, ISBN 0792380894, pp
    • M. Tabib-Azar, "Microactuators", Kluwer Boston, 1998, ISBN 0792380894, pp. 139-140.
    • (1998) Microactuators , pp. 139-140
    • Tabib-Azar, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.