Channel-select RF MEMS filters based on self-coupled AlN contour-mode piezoelectric resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1156-1159

  Zuo, Chengjie ^a   Sinha, Nipun ^a   Pisani, Marcelo B ^a   Perez, Carlos R ^a   Mahameed, Rashed ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

Aluminum nitride (AlN); Channel select filter; Contour mode resonator; Microelectromechanical systems (MEMS)

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; CRYSTAL RESONATORS; ELECTROMECHANICAL FILTERS; LIGHT METALS; NITRIDES; PIEZOELECTRICITY; RESONATORS; ULTRASONICS; WAVE FILTERS;

ALUMINUM NITRIDE; ALUMINUM NITRIDE (ALN); CHANNEL-SELECT FILTER; CONTOUR-MODE RESONATOR; CONTOUR-MODE RESONATORS; FILTER ARRAYS; LOW INSERTION LOSS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MULTI BANDS; MULTI-FREQUENCY; NARROW BANDWIDTH; NEW CLASS; PIEZOELECTRIC RESONATORS; RF MEMS FILTERS; SINGLE CHIPS; SMALL FORM FACTORS;

MICROWAVE FILTERS;

EID: 48149111823     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.292     Document Type: Conference Paper

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