메뉴 건너뛰기




Volumn , Issue , 2009, Pages 2890-2898

Wireless and batteryless surface acoustic wave sensors for high temperature environments

Author keywords

ALN; High temperature; LGS; SAW sensors; Wireless

Indexed keywords

ALN; BATTERY-LESS; CLOCK GENERATION; DELAY LINE; ELECTRONIC SYSTEMS; EMBEDDED ELECTRONICS; HIGH FREQUENCY; HIGH TEMPERATURE; HIGH-TEMPERATURE ENVIRONMENT; HOSTILE ENVIRONMENTS; LOW COSTS; MOBILE COMMUNICATIONS; NUCLEAR SITES; PHYSICAL PARAMETERS; RESONANCE FREQUENCIES; SAW DEVICE; SAW SENSORS; SMALL ANTENNA; SMALL SIZE; STABLE RESONATOR; SURFACE ACOUSTIC WAVE DEVICE; SURFACE ACOUSTIC WAVE SENSORS; WIRED AND WIRELESS; WIRELESS MEASUREMENTS;

EID: 71549162892     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEMI.2009.5274413     Document Type: Conference Paper
Times cited : (31)

References (64)
  • 1
    • 71549146814 scopus 로고    scopus 로고
    • Surface Acoustic Wave Filters With application to communications and signal processing; David Morgan; 2d Edition, 2007; Elsevier, Academic Press
    • Surface Acoustic Wave Filters With application to communications and signal processing; David Morgan; 2d Edition, 2007; Elsevier, Academic Press.
  • 2
    • 71549156197 scopus 로고    scopus 로고
    • Surface Acoustic Wave for Mobile and Wireless Communications; C. K. Campbell; 1998 Academic Press.
    • Surface Acoustic Wave for Mobile and Wireless Communications; C. K. Campbell; 1998 Academic Press.
  • 3
    • 33747853217 scopus 로고    scopus 로고
    • Microfluidic device based on surface acoustic wave Beyssen, D., Le Brizoual, L., Elmazria, O., Alnot, P.Sensors and Actuators, B: Chemical 118 (1-2), pp. 380-385
    • Microfluidic device based on surface acoustic wave Beyssen, D., Le Brizoual, L., Elmazria, O., Alnot, P.Sensors and Actuators, B: Chemical 118 (1-2), pp. 380-385
  • 4
    • 0016618555 scopus 로고
    • Measurement of SAW Velocity versus Strain for YX and ST Quartz
    • D. Cullen and T. Reeder, Measurement of SAW Velocity versus Strain for YX and ST Quartz, Proc. IEEE Ultrasonics Symp., pp. 519-522, 1975
    • (1975) Proc. IEEE Ultrasonics Symp , pp. 519-522
    • Cullen, D.1    Reeder, T.2
  • 5
    • 0004309924 scopus 로고    scopus 로고
    • Method and apparatus for measuring strain,
    • U.S. Patent US5585571
    • A. Lonsdale and B. Lonsdale, Method and apparatus for measuring strain, U.S. Patent US5585571, 1996
    • (1996)
    • Lonsdale, A.1    Lonsdale, B.2
  • 6
    • 33845559687 scopus 로고
    • Surface Acoustic Wave Probe for Chemical Analysis - Introduction and Instrument Design
    • H. Wohltjen and R. Dessy, Surface Acoustic Wave Probe for Chemical Analysis - Introduction and Instrument Design, Ana. Chem., Vol. 51 (9), pp. 1458-1475, 1979
    • (1979) Ana. Chem , vol.51 , Issue.9 , pp. 1458-1475
    • Wohltjen, H.1    Dessy, R.2
  • 7
    • 0033293885 scopus 로고    scopus 로고
    • Electronic Nose Simulation of Olfactory Response Containing 500 OrthogonalSensors in 10 Seconds
    • E. Staples, Electronic Nose Simulation of Olfactory Response Containing 500 OrthogonalSensors in 10 Seconds, Proc. IEEE Ultrasonics Symp., pp. 417-423, 1999
    • (1999) Proc. IEEE Ultrasonics Symp , pp. 417-423
    • Staples, E.1
  • 8
    • 0033295053 scopus 로고    scopus 로고
    • Passive Radio Requestable SAWWater Content Sensor, L. Reindl, C.C.W Ruppel, A. Kirmayr, N. Stockhausen and M.A. Hilhorst,Proc. IEEE Ultrasonics Symp., pp. 461-466, 1999
    • Passive Radio Requestable SAWWater Content Sensor, L. Reindl, C.C.W Ruppel, A. Kirmayr, N. Stockhausen and M.A. Hilhorst,Proc. IEEE Ultrasonics Symp., pp. 461-466, 1999
  • 9
    • 10444284156 scopus 로고    scopus 로고
    • Applicability of LiNbO3, Langasite and GaPO4 in high temperature SAW sensors operating at radio frequencies R. Fachberger, G. Bruckner, G. Knoll, R. Hauser, L. Reindl; IEEE Trans. Ultrason. Ferroel. Freq. Control, 51, No.11, pp. 1427-1431, 2004.
    • Applicability of LiNbO3, Langasite and GaPO4 in high temperature SAW sensors operating at radio frequencies R. Fachberger, G. Bruckner, G. Knoll, R. Hauser, L. Reindl; IEEE Trans. Ultrason. Ferroel. Freq. Control, 51, No.11, pp. 1427-1431, 2004.
  • 10
    • 39049167536 scopus 로고    scopus 로고
    • Wireless SAW based high-temperature measurement systems; R. Fachberger, G. Bruckner, R. Hauser , L. ReindlProc. of the IEEE Inter. Freq. Contr. Symp. pp. 358-367.
    • Wireless SAW based high-temperature measurement systems; R. Fachberger, G. Bruckner, R. Hauser , L. ReindlProc. of the IEEE Inter. Freq. Contr. Symp. pp. 358-367.
  • 11
    • 10444223020 scopus 로고    scopus 로고
    • An Interrogation Unit for Passive Wireless SAW Sensors Based on Fourier TransformM. Hamsch, R. Hoffmann, W. Buff, M. Binhack, and S. Klett; IEEE Trans.Ultras.Ferroel.& Frequ. Cont., 51, pp 1449 (2004)
    • An Interrogation Unit for Passive Wireless SAW Sensors Based on Fourier TransformM. Hamsch, R. Hoffmann, W. Buff, M. Binhack, and S. Klett; IEEE Trans.Ultras.Ferroel.& Frequ. Cont., vol. 51, pp 1449 (2004)
  • 12
    • 39049107049 scopus 로고    scopus 로고
    • A second generation in-car tire pressure monitoring system based on wireless passive SAW sensorsDixon, B., Kalinin, V., Beckley, J., Lohr, R.Proceedings of the IEEE International Frequency Control Symposium and Exposition, art. no. 4053792, pp. 374-380
    • A second generation in-car tire pressure monitoring system based on wireless passive SAW sensorsDixon, B., Kalinin, V., Beckley, J., Lohr, R.Proceedings of the IEEE International Frequency Control Symposium and Exposition, art. no. 4053792, pp. 374-380
  • 13
    • 51049118985 scopus 로고    scopus 로고
    • Application of passive SAW resonant sensors to contactless measurement of the output engine torque in passenger cars Kalinin, V, Lohr, R, Leigh, A, Bown, G.Proceedings of the IEEE International Frequency Control Symposium and Exposition, art. no. 4319124, pp. 499-504
    • Application of passive SAW resonant sensors to contactless measurement of the output engine torque in passenger cars Kalinin, V., Lohr, R., Leigh, A., Bown, G.Proceedings of the IEEE International Frequency Control Symposium and Exposition, art. no. 4319124, pp. 499-504
  • 14
    • 33846185870 scopus 로고    scopus 로고
    • High-Temperature 434 MHz Surface Acoustic Wave Devices Based on GaPO4M.N. Hamidon, V. Skarda, N.M. White,F. Krispel, P. Krempl, M. Binhack, and W. Buff, IEEE Trans.Ultras.Ferroel.& Frequ. Cont., 53, pp 2465 (2006)
    • High-Temperature 434 MHz Surface Acoustic Wave Devices Based on GaPO4M.N. Hamidon, V. Skarda, N.M. White,F. Krispel, P. Krempl, M. Binhack, and W. Buff, IEEE Trans.Ultras.Ferroel.& Frequ. Cont., vol. 53, pp 2465 (2006)
  • 15
    • 48149111317 scopus 로고    scopus 로고
    • Theoretical and experimental study of the differential thermal expansion effect on the TCD of layered SAW temperature sensors. Application to aluminum nitride based layered structures.P. Nicolay, O. Elmazria, M.B. 1ssouar, F. Sarry, L. LeBrizoual; Proceedings of IEEE Ultrasonics Symposium, art. no. 4409652, pp. 272-275 2007
    • Theoretical and experimental study of the differential thermal expansion effect on the TCD of layered SAW temperature sensors. Application to aluminum nitride based layered structures.P. Nicolay, O. Elmazria, M.B. 1ssouar, F. Sarry, L. LeBrizoual; Proceedings of IEEE Ultrasonics Symposium, art. no. 4409652, pp. 272-275 (2007)
  • 17
    • 71549143429 scopus 로고    scopus 로고
    • Surface acoustic wave sensors for high temperature applications, J. Hornsteiner, E. Born, G. Fischerauer and E. Riha 1998 IEEE International Frequency Control Symposium
    • Surface acoustic wave sensors for high temperature applications, J. Hornsteiner, E. Born, G. Fischerauer and E. Riha 1998 IEEE International Frequency Control Symposium
  • 18
    • 4143133381 scopus 로고    scopus 로고
    • 3 Based SAW Devices; R. Hauser, L. Reindl and J. Biniasch, 2003 IEEE Ultrasonics Symposium, p192-195
    • 3 Based SAW Devices; R. Hauser, L. Reindl and J. Biniasch, 2003 IEEE Ultrasonics Symposium, p192-195
  • 19
    • 0001095972 scopus 로고    scopus 로고
    • Materials for high temperature piezoelectric transducers; D. Damjanovic , Current Opinion in Solid State and Materials Science 1998,3, p 469-473
    • Materials for high temperature piezoelectric transducers; D. Damjanovic ", Current Opinion in Solid State and Materials Science" 1998,3, p 469-473
  • 20
    • 0031237685 scopus 로고    scopus 로고
    • Langasite for high temperature surface acoustic wave applications; J. Hornsteiner, E. Born and E. Riha Phys. Stat. Sol. (a) 163, R3 (1997)
    • Langasite for high temperature surface acoustic wave applications; J. Hornsteiner, E. Born and E. Riha Phys. Stat. Sol. (a) 163, R3 (1997)
  • 21
    • 4143097348 scopus 로고    scopus 로고
    • High Temperature LGS SAW devices with Pt/WO3 and Pd Sensing Films; J. Thiele and M.P. Da Cunha 2003 IEEE Ultrasonics Symposium, p 1750-1753
    • High Temperature LGS SAW devices with Pt/WO3 and Pd Sensing Films; J. Thiele and M.P. Da Cunha "2003 IEEE Ultrasonics Symposium, p 1750-1753
  • 22
    • 0032613641 scopus 로고    scopus 로고
    • Experimental and theoretical analysis of SAW properties of the Langasite Substrate with Euler Angle 0°,140°, f, A. Bungo, C. Jian, K. Yamaguchi, Y. Sawada, R. Kimura, S. Uda, Proc. IEEE Ultrasonics Symp, 1999, pp 231-234
    • Experimental and theoretical analysis of SAW properties of the Langasite Substrate with Euler Angle (0°,140°, f); A. Bungo, C. Jian, K. Yamaguchi, Y. Sawada, R. Kimura, S. Uda, Proc. IEEE Ultrasonics Symp., 1999, pp 231-234
  • 23
    • 0034449275 scopus 로고    scopus 로고
    • Recent measurements of material constants versus temperature for langatate, langanite and langasite; D.C. Malocha, M.P. Da Cunha, E. Adler, R.C. Smythe, S. Frederick, M. Chou, R. Helmbold, Y.S. Zhou, Proc. of the Annual IEEE International Frequency Control Symposium, 2000, pp 200-205
    • Recent measurements of material constants versus temperature for langatate, langanite and langasite; D.C. Malocha, M.P. Da Cunha, E. Adler, R.C. Smythe, S. Frederick, M. Chou, R. Helmbold, Y.S. Zhou, "Proc. of the Annual IEEE International Frequency Control Symposium, 2000, pp 200-205
  • 24
    • 29144441083 scopus 로고    scopus 로고
    • Investigation on SAW Properties of LGS and Optimal Cuts for High-Temperature Applications, XiaoJun Ji, Tao Han, WenKang Shi, and GuoWei Zhang IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 52, NO.11, November 2005, p 2075-2080
    • Investigation on SAW Properties of LGS and Optimal Cuts for High-Temperature Applications ; XiaoJun Ji, Tao Han, WenKang Shi, and GuoWei Zhang IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 52, NO.11, November 2005, p 2075-2080
  • 25
    • 67649355177 scopus 로고    scopus 로고
    • Extraction of COM parameters on Pt/LGS for high temperature SAW sensor; T. Aubert, F. Sarry, O. Elmazria, L. Bouvot, B. Assouar, P. Nicolay and M. Hehn Proc. of 2008 IEEE Ultrasonics International Sympo; p 820-823
    • Extraction of COM parameters on Pt/LGS for high temperature SAW sensor; T. Aubert, F. Sarry, O. Elmazria, L. Bouvot, B. Assouar, P. Nicolay and M. Hehn Proc. of 2008 IEEE Ultrasonics International Sympo; p 820-823
  • 26
    • 71549168249 scopus 로고    scopus 로고
    • Surface-Wave Devices for Signal Processing; D. P. Morgan, Elsevier Editions, 1991
    • Surface-Wave Devices for Signal Processing; D. P. Morgan, Elsevier Editions, 1991
  • 27
    • 0034446226 scopus 로고    scopus 로고
    • Langasite Surface Acoustic Wave Sensors For High Temperatures; M. Honal, R. Fachberger, T. Holzheu, E. Riha, E. Born, P. Pongratz and A. Bausewein 2000 IEEE/EIA International Frequency Control Symposium and Exhibition, p 113-118
    • Langasite Surface Acoustic Wave Sensors For High Temperatures; M. Honal, R. Fachberger, T. Holzheu, E. Riha, E. Born, P. Pongratz and A. Bausewein 2000 IEEE/EIA International Frequency Control Symposium and Exhibition, p 113-118
  • 28
    • 4143103773 scopus 로고    scopus 로고
    • SAW Resonators at High Temperatures; W. Buff, M. Binhack, S. Klett, M. Hamsch, R. Hoffmann, F. Krispel, W. Wallnöfer, 2003 IEEE Ultrasonics Symposium, p187-191
    • SAW Resonators at High Temperatures; W. Buff, M. Binhack, S. Klett, M. Hamsch, R. Hoffmann, F. Krispel, W. Wallnöfer, 2003 IEEE Ultrasonics Symposium, p187-191
  • 29
    • 21644465894 scopus 로고    scopus 로고
    • Properties of radio frequency Rayleigh waves on Langasite at elevated temperatures; R. Fachberger, G. Bruckner, R. Hauser, C. Ruppel, J. Biniasch and L. Reindl 2004 IEEE Ultrasonics Symposium, p 1223-1226
    • Properties of radio frequency Rayleigh waves on Langasite at elevated temperatures; R. Fachberger, G. Bruckner, R. Hauser, C. Ruppel, J. Biniasch and L. Reindl 2004 IEEE Ultrasonics Symposium, p 1223-1226
  • 31
    • 48149090180 scopus 로고    scopus 로고
    • Enabling very High température acoustic wave devices for sensor and frequency control applications; M. Pereira da Cunha, T. Moonlight, R. J. Lad, G. Bernhardt and D.J. Frankel Proc. of 2007 IEEE Ultrasonics International Symposium; p 2107-2110
    • Enabling very High température acoustic wave devices for sensor and frequency control applications; M. Pereira da Cunha, T. Moonlight, R. J. Lad, G. Bernhardt and D.J. Frankel Proc. of 2007 IEEE Ultrasonics International Symposium; p 2107-2110
  • 32
    • 67649362469 scopus 로고    scopus 로고
    • SAW-Relevant material properties of Langasite in the temperature range from 25 to 750°C : new experimental results; I. Shrena, D. Eisele, E. Mayer, L. Reindl, J. Bardong and M. Schmitt, Proc. of 2008 IEEE Ultrasonics International Symposium, p 209-212
    • SAW-Relevant material properties of Langasite in the temperature range from 25 to 750°C : new experimental results; I. Shrena, D. Eisele, E. Mayer, L. Reindl, J. Bardong and M. Schmitt, Proc. of 2008 IEEE Ultrasonics International Symposium, p 209-212
  • 33
    • 55749086003 scopus 로고    scopus 로고
    • Precise measurements of BAW and SAW properties of Langasite in the range from 25°C to 1000°C; J. Bardong, M. Schulz, M. Schmitt, I. Shrena, D. Eisele, E. Mayer, L. Reindl and H. Fritze Proc. of 2008 IEEE Ultrasonics International Symposium ; p 326-331
    • Precise measurements of BAW and SAW properties of Langasite in the range from 25°C to 1000°C; J. Bardong, M. Schulz, M. Schmitt, I. Shrena, D. Eisele, E. Mayer, L. Reindl and H. Fritze Proc. of 2008 IEEE Ultrasonics International Symposium ; p 326-331
  • 34
    • 67649360319 scopus 로고    scopus 로고
    • New measurement method to characterise piezoelectric SAW substrates at very high temperature; P. Nicolay, O. Elmazria, F. Sarry, T. Aubert, L. Bouvot and M. Hehn , Proc. of 2008 IEEE Ultrasonics International Sympo; p 1877-1880
    • New measurement method to characterise piezoelectric SAW substrates at very high temperature; P. Nicolay, O. Elmazria, F. Sarry, T. Aubert, L. Bouvot and M. Hehn ", Proc. of 2008 IEEE Ultrasonics International Sympo; p 1877-1880
  • 35
    • 71549125513 scopus 로고    scopus 로고
    • High temperature stability of langasite surface acoustic wave devices; M. Pereira da Cunha, R. J. Lad, T. Moonlight, G. Bernhardt and D.J. Frankel Proc. of 2008 IEEE Ultrasonics International Sympo. ; p 205-208
    • High temperature stability of langasite surface acoustic wave devices; M. Pereira da Cunha, R. J. Lad, T. Moonlight, G. Bernhardt and D.J. Frankel "Proc. of 2008 IEEE Ultrasonics International Sympo. ; p 205-208
  • 36
    • 0031167338 scopus 로고    scopus 로고
    • 4 : a new piezoelectric crystal material for high-temperature sensorics; P. W. Krempl, G. Schleinzer and W. Wallnöfer Sensors Actuators A 1997, 61, p 361-363
    • 4 : a new piezoelectric crystal material for high-temperature sensorics; P. W. Krempl, G. Schleinzer and W. Wallnöfer "Sensors Actuators A 1997, 61, p 361-363
  • 38
    • 0036995393 scopus 로고    scopus 로고
    • Temperature sensors based on GaPO4; P. W. Krempl, C. Reiter, W. Wallnöffer Proc. of 2002 IEEE Ultrasonics International Symposium, p 949-952
    • Temperature sensors based on GaPO4; P. W. Krempl, C. Reiter, W. Wallnöffer Proc. of 2002 IEEE Ultrasonics International Symposium, p 949-952
  • 39
    • 0034138931 scopus 로고    scopus 로고
    • Distinct orientation of AlN thin films deposited on sapphire substrates by laser ablation; J. Meinschien, F. Falk, R. Hergt and H. Stafast Appl. Phys. A70 (2000), p 215-218
    • Distinct orientation of AlN thin films deposited on sapphire substrates by laser ablation; J. Meinschien, F. Falk, R. Hergt and H. Stafast "Appl. Phys. A70 (2000), p 215-218
  • 40
    • 0038361108 scopus 로고    scopus 로고
    • Electrical properties of Piezoelectric AlN Films Deposited by DC Magnetron Sputtering; O. Elmazria, M.B. Asouar, P. Renard and P. Alnot, Physica Status Solidi (a) 196, No. 2, 416-421 (2003); z
    • Electrical properties of Piezoelectric AlN Films Deposited by DC Magnetron Sputtering; O. Elmazria, M.B. Asouar, P. Renard and P. Alnot, Physica Status Solidi (a) 196, No. 2, 416-421 (2003); z
  • 41
    • 0000939713 scopus 로고    scopus 로고
    • Sound velocity of AlxGa1-xN thin -lms obtained by surface acoustic-wave measurements ; C. Deger, E. Born, H. Angerer, O. Ambacher, M. Stutzmann, J. Hornsteiner, E. Riha, and G. Fischerauer, Appl. Phys. Lett., 72, No. 19, 11 May 1998, p 2400-2402
    • Sound velocity of AlxGa1-xN thin -lms obtained by surface acoustic-wave measurements ; C. Deger, E. Born, H. Angerer, O. Ambacher, M. Stutzmann, J. Hornsteiner, E. Riha, and G. Fischerauer, Appl. Phys. Lett., Vol. 72, No. 19, 11 May 1998, p 2400-2402
  • 42
    • 33744806057 scopus 로고    scopus 로고
    • 5GHz SAW devices based on AlN/diamond layered structure realized using e-beam lithography , P. Kirsch, M. B. Assouar, O. Elmazria, V. Mortet, and P. Alnot Appl. Phys. Lett. 88, (2006) p 223504-1 223504-3
    • 5GHz SAW devices based on AlN/diamond layered structure realized using e-beam lithography , P. Kirsch, M. B. Assouar, O. Elmazria, V. Mortet, and P. Alnot Appl. Phys. Lett. 88, (2006) p 223504-1 223504-3
  • 43
    • 0034291501 scopus 로고    scopus 로고
    • Influence of nitrogen incorporation on the electrical properties of MPCVD diamond films growth in CH4-CO2-N-2 and CH4-H-2-N-2 gas mixtures; Elmazria O, Bougdira J, Chatei H, M. Remy, Alnot, P; Thin Solid Films; 374, 2002 pp 27-33
    • Influence of nitrogen incorporation on the electrical properties of MPCVD diamond films growth in CH4-CO2-N-2 and CH4-H-2-N-2 gas mixtures; Elmazria O, Bougdira J, Chatei H, M. Remy, Alnot, P; Thin Solid Films; Vol. 374, (2002) pp 27-33
  • 44
    • 0022115013 scopus 로고    scopus 로고
    • Zero-Temperature Coefficient SAW Devices on AlN Epitaxial Films; K. Tsubouchi and N. Mikoshiba IEEE Transactions on Sonics and Ultrasonics, SU-32, NO. 5, September 1985, p 634-644
    • Zero-Temperature Coefficient SAW Devices on AlN Epitaxial Films; K. Tsubouchi and N. Mikoshiba "IEEE Transactions on Sonics and Ultrasonics, Vol. SU-32, NO. 5, September 1985, p 634-644
  • 45
    • 21644484798 scopus 로고    scopus 로고
    • Fabrication of 5-GHz-Band SAW Filter with Atomically-Flat-Surface AlN on Sapphire; K. Uehara, C. M. Yang, T. Shibata, S. K. Kim, S. Kameda, H. Nakase and K. Tsubouchi , 2004 IEEE Ultrasonics Symposium, p 203-206
    • Fabrication of 5-GHz-Band SAW Filter with Atomically-Flat-Surface AlN on Sapphire; K. Uehara, C. M. Yang, T. Shibata, S. K. Kim, S. Kameda, H. Nakase and K. Tsubouchi ", 2004 IEEE Ultrasonics Symposium, p 203-206
  • 46
    • 28144462895 scopus 로고    scopus 로고
    • Low Temperature AlN Thin Films Growth for Layered Stucture SAW and BAW Devices; M. B. Assouar, O. Elmazria, M. El Hakiki, P. Alnot and C. Tiusan 2004 IEEE International Symposium on Applications of Ferroelectrics, p 43-46
    • Low Temperature AlN Thin Films Growth for Layered Stucture SAW and BAW Devices; M. B. Assouar, O. Elmazria, M. El Hakiki, P. Alnot and C. Tiusan "2004 IEEE International Symposium on Applications of Ferroelectrics, p 43-46
  • 47
    • 71549166604 scopus 로고    scopus 로고
    • High-temperature oxidation-resistant coatings; National academy of sciences/National academy of engineering, 1970
    • High-temperature oxidation-resistant coatings; National academy of sciences/National academy of engineering, 1970
  • 48
    • 0037594261 scopus 로고    scopus 로고
    • A crystallographic model of (001) aluminium nitride expitaxial thin film growth on (001) sapphire substrate; C. J. Sun, P. Kung, A. Saxler, H. Ohsato, K. Haritos and M. Razeghi J. Appl. Phys. 75 (8), 15 April 1994, p 3964-3967
    • A crystallographic model of (001) aluminium nitride expitaxial thin film growth on (001) sapphire substrate; C. J. Sun, P. Kung, A. Saxler, H. Ohsato, K. Haritos and M. Razeghi J. Appl. Phys. 75 (8), 15 April 1994, p 3964-3967
  • 49
    • 38549134356 scopus 로고    scopus 로고
    • Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films; C. Caliendo
    • Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films; C. Caliendo, Appl. Phys. Lett. 92, 033505 (2008)
    • (2008) Appl. Phys. Lett , vol.92 , pp. 033505
  • 50
    • 5344240387 scopus 로고    scopus 로고
    • Thermal stability and desorption of Group III nitrides prepared by metal organic chemical vapor deposition; O. Ambacher, M. S. Brandt, R. Dimitrov, T. Metzger, M. Stutzmann, R. A. Fisher, A. Miehr, A. Bergmaier and G. Dollinger, J. Vac. Sci. Technol. B 146, Nov/Dec 1996, p 3532-3542
    • Thermal stability and desorption of Group III nitrides prepared by metal organic chemical vapor deposition; O. Ambacher, M. S. Brandt, R. Dimitrov, T. Metzger, M. Stutzmann, R. A. Fisher, A. Miehr, A. Bergmaier and G. Dollinger, J. Vac. Sci. Technol. B 14(6), Nov/Dec 1996, p 3532-3542
  • 51
    • 28144440572 scopus 로고    scopus 로고
    • High frequency, high temperature ultrasonic transducers; N. D. Patel and P. S. Nicholson; Ndt International 23 N° 5 Oct. (1990), p 262-266
    • High frequency, high temperature ultrasonic transducers; N. D. Patel and P. S. Nicholson; Ndt International Volume 23 N° 5 Oct. (1990), p 262-266
  • 52
    • 38549122348 scopus 로고    scopus 로고
    • High temperature assessment of nitride-based devices; R. Cuerdo, J. Pedrós, A. Navarro, A. F. Braña, J. L. Pau, E. Munõz and F. Calle ; J. Mater. Sci : Mater. Electron. (2008) 19, p189-193
    • High temperature assessment of nitride-based devices; R. Cuerdo, J. Pedrós, A. Navarro, A. F. Braña, J. L. Pau, E. Munõz and F. Calle ; J. Mater. Sci : Mater. Electron. (2008) 19, p189-193
  • 53
    • 33747056315 scopus 로고    scopus 로고
    • Measurement of output voltage of aluminium nitride thin film as a pressure sensor at high temperature; K. Kishi, Y. Ooishi, H. Noma, E. Ushijima, N. Ueno, M. Akiyama and T. Tabaru, Journal of the European Ceramic Society 26 2006, p 3425-3430
    • Measurement of output voltage of aluminium nitride thin film as a pressure sensor at high temperature; K. Kishi, Y. Ooishi, H. Noma, E. Ushijima, N. Ueno, M. Akiyama and T. Tabaru, Journal of the European Ceramic Society 26 (2006), p 3425-3430
  • 54
    • 36249004509 scopus 로고    scopus 로고
    • Oxidation behaviour of AlN films at high temperature under controlled atmosphere; C-Y. Lin and F-H. Lu
    • Oxidation behaviour of AlN films at high temperature under controlled atmosphere; C-Y. Lin and F-H. Lu "J. Eur. Ceram. Soc., 2008, 28, 691-698
    • (2008) J. Eur. Ceram. Soc , vol.28 , pp. 691-698
  • 55
    • 0034317769 scopus 로고    scopus 로고
    • High temperature materials for thin-lm thermocouples on silicon wafers; K. G. Kreider, G. Gillen; Thin Solid Films 376 (2000), p32-37
    • High temperature materials for thin-lm thermocouples on silicon wafers; K. G. Kreider, G. Gillen; Thin Solid Films 376 (2000), p32-37
  • 56
    • 33644579719 scopus 로고    scopus 로고
    • Oxidation of the platinum-group metals; C. A. Krier and R. I. Jaffee J. Less-Common Metals, 5 (1963), p 411-431
    • Oxidation of the platinum-group metals; C. A. Krier and R. I. Jaffee J. Less-Common Metals, 5 (1963), p 411-431
  • 57
    • 0004290098 scopus 로고
    • Reactions of oxygen with the platinum metals - II
    • Reactions of oxygen with the platinum metals - II; J. C. Chaston; Platinum Metals Rev., 1965, 9, (2), p 51-56
    • (1965) J. C. Chaston; Platinum Metals Rev , vol.9 , Issue.2 , pp. 51-56
  • 58
    • 67349246331 scopus 로고    scopus 로고
    • Stability of thin platinum films implemented in high-temperature microdevices; R. M. Tiggelaar, R. G. P. Sanders, A. W. Groenland, J. G. E. Gardeniers Sens. Actuators A: Phys. (2009), doi : 10.1016/j.sna.2009.03.017
    • Stability of thin platinum films implemented in high-temperature microdevices; R. M. Tiggelaar, R. G. P. Sanders, A. W. Groenland, J. G. E. Gardeniers Sens. Actuators A: Phys. (2009), doi : 10.1016/j.sna.2009.03.017
  • 59
    • 71549134248 scopus 로고    scopus 로고
    • Technologies for high-temperature silicon microreactors; C. Alépée; Ph.D. thesis, École polytechnique fédérale de Lausanne (EPFL), Lausanne, Switzerland, 2000
    • Technologies for high-temperature silicon microreactors; C. Alépée; Ph.D. thesis, École polytechnique fédérale de Lausanne (EPFL), Lausanne, Switzerland, 2000
  • 60
    • 71549154321 scopus 로고    scopus 로고
    • Acoustic Wave Sensors D. S. Ballantine, R. M. White, S. J. Martin, A. J. Ricco, E. T. Zellers, G.C. Frye and H. Wohltjen, Academic Press, 1997
    • Acoustic Wave Sensors D. S. Ballantine, R. M. White, S. J. Martin, A. J. Ricco, E. T. Zellers, G.C. Frye and H. Wohltjen, Academic Press, 1997
  • 62
    • 0032048189 scopus 로고    scopus 로고
    • Stabilized Platinum Electrodes for Ferroelectric Film Deposition using Ti, Ta and Zr Adhesion Layers; T. Maeder, L. Sagalowicz an; d P. Muralt Jpn. J. Appl. Phys. 37 (1998), p 2007-2012
    • Stabilized Platinum Electrodes for Ferroelectric Film Deposition using Ti, Ta and Zr Adhesion Layers; T. Maeder, L. Sagalowicz an; d P. Muralt "Jpn. J. Appl. Phys. Vol. 37 (1998), p 2007-2012
  • 63
    • 71549159987 scopus 로고    scopus 로고
    • Binary alloy phase diagrams; T. B. Massalski 1st edi., 2, 1986, American Society for Metals
    • Binary alloy phase diagrams; T. B. Massalski 1st edi., vol. 2, 1986, American Society for Metals
  • 64
    • 34547671050 scopus 로고    scopus 로고
    • Effect of annealing in oxygen atmosphere on morphological and electrical properties of iridium and ruthenium thin films prepared by liquid delivery MOCVD; M. Lisker, T. Hur'yeva, Y. Ritterhaus and E. P. Burte Surface and Coatings Technology 201 (2007), p 9294-9298
    • "Effect of annealing in oxygen atmosphere on morphological and electrical properties of iridium and ruthenium thin films prepared by liquid delivery MOCVD; M. Lisker, T. Hur'yeva, Y. Ritterhaus and E. P. Burte Surface and Coatings Technology 201 (2007), p 9294-9298


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.