Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films

IEEE Transactions on Sonics and Ultrasonics

Volumn 32, Issue 5, 1985, Pages 634-644

  Tsubouch, Kazuo ^a   Mikoshiba, Nobuo ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CRYSTALS - EPITAXIAL GROWTH;

ACOUSTIC SURFACE-WAVE DELAY LINES; ACOUSTIC SURFACE-WAVE DEVICE THERMAL FACTORS; PIEZOELECTRIC FILMS/DEVICES; SILICON-ON-INSULATOR CIRCUITS;

ALUMINUM COMPOUNDS;

EID: 0022115013     PISSN: 00189537     EISSN: None     Source Type: Journal    
DOI: 10.1109/T-SU.1985.31647     Document Type: Article

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