Measurement of output voltage of aluminum nitride thin film as a pressure sensor at high temperature

Journal of the European Ceramic Society

Volumn 26, Issue 15, 2006, Pages 3425-3430

  Kishi, Kazushi ^a   Ooishi, Yasunobu ^a   Noma, Hiroaki ^a   Ushijima, Eizo ^a   Ueno, Naohiro ^a   Akiyama, Morito ^a   Tabaru, Tatsuo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AlN; Films; Nitrides; Piezoelectric properties; Sensors

Indexed keywords

HIGH TEMPERATURE APPLICATIONS; PIEZOELECTRICITY; SENSORS; THIN FILMS; VOLTAGE MEASUREMENT;

ALUMINUM NITRIDE THIN FILM; OUTPUT VOLTAGE; PIEZOELECTRIC PROPERTIES; PRESSURE SENSOR;

ALUMINUM NITRIDE;

ALUMINUM NITRIDE; HIGH TEMPERATURE APPLICATIONS; PIEZOELECTRICITY; SENSORS; THIN FILMS; VOLTAGE MEASUREMENT;

EID: 33747056315     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2005.08.011     Document Type: Article

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