Fabrication of high temperature surface acoustic wave devices for sensor applications

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 403-407

  Hamidon, M N ^a   Skarda, V ^a   White, N M ^a   Krispel, F ^b   Krempl, P ^c   Binhack, M ^d   Buff, W ^d  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b Piezocryst GmbH   (Austria)

^c AVL LIST GMBH   (Austria)

^d ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Fabrication; Gallium orthophosphate (GaPO 4); High temperature; Surface acoustic wave

Indexed keywords

ADHESION; FABRICATION; GALLIUM COMPOUNDS; HIGH TEMPERATURE EFFECTS; NATURAL FREQUENCIES; PLATINUM; SENSORS; SIGNAL PROCESSING; TITANIUM;

GALLIUM ORTHOPHOSPHATE (GAPO4); HIGH TEMPERATURE; LIFT-OFF TECHNIQUE; SURFACE ACOUSTIC WAVES;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 24944440195     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.038     Document Type: Conference Paper

References (12)

1. K.A. Snook, J.-Z. Zhao, C.H.F. Alves, J.M. Cannata, W.-H. Chen, R.J. Meyer, T.A. Ritter, and K.K. Shung Design, fabrication and evaluation of high frequency, single-element transducers incorporating different materials IEEE Trans. Ultrasonics Ferroelectr. Frequency Control 49 2002 169 176
2. S. Mallikarjum, J. Kosinski, and A. Ballato Mass loading measurements of quartz crystal plate Proceedings of the IEEE Frequency Control Symposium 1989 365 371
3. A. Ballato, J. Kosinski, and T. Lukaszek Temperature and angular variations of piezoelectric coupling in quartz Proceedings of the IEEE Frequency Control Symposium 1988 353 356
4. R.L. Filler, and J.R. Rig Fundamental mode SC-cut resonators Proceedings of the IEEE Frequency Control Symposium 1980 187 193
5. O. Lewis Relationship of resonant frequency of quartz crystal to mass loading Proceedings of the IEEE Frequency Control Symposium 1975 5 9
6. Project Funded by European Community Under the IMT Programme, Remote Monitoring of Strain Extension Using a Novel Sensing Element, Contract Number: BRPR-CT96-0361, 2000.
7. E. Bigler, J.-B. Briot, A comparison of surface transverse wave propagation on quartz and gallium orthophosphate, Forum ASA/AEE, 1999.
8. 4 Proceedings of the IEEE Frequency Control Symposium 1995 605 610
9. E. Benes, M. Groschl, F. Seifert, and A. Pohl Comparison between BAW and SAW sensor principles IEEE Trans. Ultrasonics Ferroelectr. Frequency Control 44 1998 1314 1330
10. 4 Ann. Chim. Sci. Mat. 26 2001 161 164
11. E. Bigler, S. Ballandras, C. Bonjour, D. Palmier, and E. Philippot Experimental study of saw propagation on gallium orthophosphate Proceedings of the IEEE Frequency Control Symposium 1994 385 389
12. W. Buff, M. Binhack, S. Klett, M. Hamsch, R. Hoffmann, F. Krispel, and W. Wallnofer SAW resonators at high temperature Proceedings of the IEEE Frequency Control Symposium 2003 187 191