Sound velocity of AlxGa1-xN thin films obtained by surface acoustic-wave measurements

Applied Physics Letters

Volumn 72, Issue 19, 1998, Pages 2400-2402

  Deger, C ^a   Born, E ^a   Angerer, H ^b   Ambacher, O ^b   Stutzmann, M ^b   Hornsteiner, J ^c   Riha, E ^c   Fischerauer, G ^c  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b WALTER SCHOTTKY INSTITUT   (Germany)

^c SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000939713     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121368     Document Type: Article

References (18)

1. J. C. Thorpe and K. H. Yen, IEEE Ultrason. Symp. Proc. 882 (1979).
2. G. D. O'Clock and M. T. Duffy, Appl. Phys. Lett. 23, 55 (1973).
3. H. Okano, N. Tanaka, Y. Takahashi, T. Tanaka, K. Shibata, and S. Nakano, Appl. Phys. Lett. 64, 166 (1994).
4. K. Tsubouchi and N. Mikoshiba, IEEE Trans. Sonics Ultrason. SU-32, 634 (1985).
5. S. Yoshida, S. Misawa, Y. Fujii, S. Takada, H. Hayakawa, S. Gonda, and A. Itoh, J. Vac. Sci. Technol. 16, 990 (1979).
6. L. E. McNeil, M. Grimsditch, and R. H. French, J. Am. Ceram. Soc. 76, 1132 (1993).
7. A. Polian, M. Grimsditch, and I. Grzegory, J. Appl. Phys. 79, 3343 (1996).
8. R. B. Schwarz and K. Khachaturyan, Appl. Phys. Lett. 70, 1122 (1997).
9. K. Kim, W. R. L. Lambrecht, and B. Segall, Mater. Res. Soc. Symp. Proc. 395, 399 (1996).
10. D. Brunner, H. Angerer, E. Bustarret, F. Freudenberg, R. Höpler, R. Dimitrov, O. Ambacher, and M. Stutzmann, J. Appl. Phys. 82, 5090 (1997).
11. M. Buchner, W. Ruile, A. Dietz, and R. Dill, IEEE Ultrason. Symp. Proc., 371 (1991).
12. A. F. Wright, J. Appl. Phys. 82, 2833 (1997).
13. Landolt-Börnstein, Numerical Data and Functional Relationships, New Series, edited by O. Madelung (Springer, New York, 1979).
14. L. Vegard, Z. Phys. 5, 17 (1921).
15. H. Angerer, D. Brunner, F. Freudenberg, O. Ambacher, M. Stutzmann, R. Höpler, T. Metzger, E. Born, G. Dollinger, A. Bergmaier, S. Karsch, and H.-J. Körner, Appl. Phys. Lett. 71, 1504 (1997).
16. B. A. Auld, Acoustic Fields and Waves in Solids (Wiley, New York, 1973), Vol. 1.
17. M. Yamaguchi, T. Yagi, T. Azuhata, T. Sota, K. Suzuki, S. Chichibu, and S. Nakamura, J. Phys.: Condens. Matter 9, 241 (1997).
18. A. D. Bykhovski, V. V. Kaminski, M. S. Shur, Q. C. Chen, and M. A. Kahn, Appl. Phys. Lett. 68, 818 (1996).