Theoretical and experimental investigation of gigahertz-band, temperature-compensated electromechanical coupling configurations based on AlN films

Applied Physics Letters

Volumn 92, Issue 3, 2008, Pages

  Caliendo, Cinzia ^a  

^a ISC CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; PHOTOLITHOGRAPHY; PIEZOELECTRIC MATERIALS; SUBSTRATES;

CONVENTIONAL PHOTOLITHOGRAPHIC PROCESS; ELECTRICAL BEHAVIOR; ELECTRICAL BOUNDARY CONDITIONS;

ELECTROMECHANICAL COUPLING;

EID: 38549134356     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2837179     Document Type: Article

References (17)

1. Y. Takagaki, P. V. Santos, E. Wiebicke, O. Brandt, H. P. Schonherr, and K. H. Ploog, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1509471 81, 2538 (2002).
2. G. H. Kim, M. J. Keum, H. I. Seo, D. S. Park, and K. H. Kim, Proceedings of the IEEE Ultrasonics Symposium, Honolulu, HI, 2003 (IEEE, New York, 2003), p. 2020.
3. R. Lanz and P. Muralt, Proceedings of the IEEE Ultrasonics Symposium, Honolulu, HI, 2003 (IEEE, New York, 2003), p. 178.
4. K. M. Lakin and K. G. Lakin, Proceedings of the IEEE Ultrasonics Symposium, Honolulu, HI, 2003 (IEEE, New York, 2003), p. 74.
5. C. M. Yang, K. Uehara, S. K. Kim, S. Kameda, H. Nakase, and K. Tsubouchi, Proceedings of the IEEE Ultrasonics Symposium, Honolulu, Hawaii, 2003 (IEEE, New York, 2003), p. 170.
6. V. Mortet, O. Elmazria, M. B. Assouar, G. Vanhoyland, J. D'Haen, and P. Alnot, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1503875 81, 1720 (2002).
7. H. Morkoc, Nitride Semiconductors and Devices (Springer, Berlin, 1999).
8. K. Tsubuochi, K. Sugai, and N. Mikoshiba, Proceedings of the IEEE Ultrasonics Symposium, San Diego, CA, 1982 (IEEE, New York, 1982), p. 340.
9. K. Tsubouchi and N. Mikoshiba, IEEE Trans. Sonics Ultrason. IESUAU 0018-9537 SU-32, 634 (1985).
10. C. Caliendo, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1631739 83, 4851 (2003).
11. C. Caliendo and P. Imperatori, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1777809 96, 2610 (2004).
12. C. Caliendo, J. Appl. Phys. JAPIAU 0021-8979 (submitted).
13. E. L. Adler, G. W. Farnell, J. Slaboszewicz, and C. K. Jen, Proceedings of the IEEE Ultrasonics Symposium, San Diego, CA, 1988 (IEEE, New York, 1982), p. 103.
14. A. J. Slobodnik, Jr., E. D. Conway, and R. T. Delmonico, Air Force Cambridge Research Laboratories Report No. AFCRL-TR-73-0597, 1973
15. Crystal and Solid State Physics, Landolt-Börnstein, New Series, Group III, Vol. 1 (Springer, Berlin, 1979).
16. V. M. Ristic, Principles of Acoustic Devices (Wiley, New York, 1983).
17. G. S. Kino and R. S. Wagner, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1662397 44, 1480 (1973).