Theoretical and experimental study of the differential thermal expansion effect on the TCD of layered SAW temperature sensors. Application to aluminum nitride based layered structures

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 272-275

  Nicolay, P ^a,b   Elmazria, O ^a   Assouar, B ^a   Sarry, F ^a   Lebrizoual, L ^a  

^a INSTITUT JEAN LAMOUR   (France)

^b DOERLER Mesures   (France)

Author keywords

AlN; Multilayer; TCD; Temperature coefficients; Thermal strain

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINA; ALUMINUM COMPOUNDS; ELASTIC CONSTANTS; EXPERIMENTS; FILM PREPARATION; ION SENSITIVE FIELD EFFECT TRANSISTORS; MATHEMATICAL MODELS; MULTILAYERS; NITRIDES; THERMAL SPRAYING; THERMAL STRESS; ULTRASONICS;

ALN; ALN THIN FILMS; ALUMINUM NITRIDES; CAMPBELL; DIFFERENTIAL THERMAL EXPANSIONS; DOUBLE LAYER STRUCTURES; EXPERIMENTAL DATUMS; EXPERIMENTAL STUDIES; GLOBAL STRUCTURES; LAYERED STRUCTURES; NUMERICAL MODELS; NUMERICAL RESULTS; SAW STRUCTURES; STRAIN FIELDS; TCD; TEMPERATURE COEFFICIENTS; THERMAL STRAIN;

THERMAL EXPANSION;

EID: 48149111317     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.79     Document Type: Conference Paper

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