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Thin Solid Films

Volumn 376, Issue 1-2, 2000, Pages 32-37

High temperature materials for thin-film thermocouples on silicon wafers

(2) Kreider, Kenneth G a Gillen, Greg a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROSCOPY; IRIDIUM; OPTICAL MICROSCOPY; PALLADIUM; RAPID THERMAL ANNEALING; RHODIUM; SECONDARY ION MASS SPECTROMETRY; SILICON SENSORS; SILICON WAFERS; THERMOCOUPLES; THERMOELECTRICITY; THIN FILMS;

THIN-FILM THERMOCOUPLES;

SEMICONDUCTING FILMS;

EID: 0034317769 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(00)01346-8 Document Type: Article

Times cited : (72)

References (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.