Stability of thin platinum films implemented in high-temperature microdevices

Sensors and Actuators, A: Physical

Volumn 152, Issue 1, 2009, Pages 39-47

  Tiggelaar, R M ^a   Sanders, R G P ^a   Groenland, A W ^a   Gardeniers, J G E ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Microheaters; Microreactors; Platinum; Temperature sensors; Thin films

Indexed keywords

ADHESION LAYERS; ELECTRICAL MEASUREMENTS; ELECTRICAL PROPERTIES; GAS SENSORS; GRAIN SIZES; HIGH TEMPERATURES; MECHANICAL STRAINS; MICRO-DEVICES; MICROHEATERS; MICROREACTORS; OPTICAL MICROSCOPES; PT FILMS; STRUCTURAL AND ELECTRICAL PROPERTIES; THIN PLATINUM FILMS; X- RAY DIFFRACTIONS;

ADHESION; CHEMICAL REACTORS; ELECTRIC PROPERTIES; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; PORTABLE EQUIPMENT; SINTERING; TANTALUM; TEMPERATURE SENSORS; THIN FILMS;

PLATINUM;

EID: 67349246331     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.03.017     Document Type: Article

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