Piezoresistive feedback control of a mems thermal actuator

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1267-1278

  Messenger, Robert K ^a   Aten, Quentin T ^b   McLain, Timothy W ^b   Howell, Larry L ^b  

^a Technology Development Operations HP   (United States)

^b Brigham Young University   (United States)

Author keywords

Dynamic response; Feedback control; Nano positioning; Piezoresistive sensor; Thermal actuator

Indexed keywords

CLOSED-LOOP CONTROL; DEVICE PERFORMANCE; ELECTRICAL SIGNAL; FEED-BACK SENSORS; IN-PLANE; MEMS THERMAL ACTUATORS; MEMS-STRUCTURE; MEMSDEVICES; MICRODISPLACEMENT TRANSDUCERS; MICROELECTROMECHANICAL SYSTEMS; NANO-POSITIONING; ON CHIPS; PIEZO-RESISTIVE; PIEZORESISTIVE PROPERTIES; PIEZORESISTIVE SENSING; PIEZORESISTIVE SENSORS; POLY-CRYSTALLINE SILICON; RESISTANCE CHANGE; STEADY STATE ERRORS; THERMAL ACTUATOR; THERMO-MECHANICAL;

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; COMPOSITE MICROMECHANICS; DYNAMIC RESPONSE; FEEDBACK CONTROL; MEMS; MICROELECTROMECHANICAL DEVICES; NANOSENSORS; POLYSILICON; STATE FEEDBACK; SURFACE MICROMACHINING; TECHNOLOGICAL FORECASTING; THERMAL INSULATING MATERIALS;

FEEDBACK;

EID: 71549145351     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2035370     Document Type: Article

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