Thermal drift of piezoresistive properties of LPCVD polysilicon thin films between room temperature and 200°C

Materials Science and Engineering B

Volumn 46, Issue 1-3, 1997, Pages 43-46

  Kleimann, P ^a   Semmache, B ^a   Le Berre, M ^a   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

LPCVD polysilicon thin film; Piezoresistance; Thermal drift

Indexed keywords

ANNEALING; BORON; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; GRAIN BOUNDARIES; OXIDATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DOPING; THERMAL EFFECTS;

CLAMPED BEAM TECHNIQUE; LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); PIEZORESISTANCE;

THIN FILMS;

EID: 0042727039     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01927-7     Document Type: Article

References (19)

1. J.W. Seto, J. Appl. Phys., 47 (1976) 4780.
2. J. Erskine, IEEE Trans. ED-30, 7(1983) 796.
3. J. Suski, V. Mosser and J. Goss, Sensors and Actuators, 17 (1989) 405.
4. E. Obermeier and P. Kopystynski, Sensors and Actuators A, 30 (1992) 149.
5. M. Le Berre, M. Lemiti, D. Barbier, P. Pinard, J. Cali, E. Bustarret, J. Sicart and J.L, Robert, Mat. Res. Soc. Symp. Proc., 343 (1994) 733.
6. V. Mosser, J. Suski, J. Goss and E. Obermeier, Sensors and Actuators A, 25(1991) 113.
7. P.J. French and A.G.R. Evans, Sensors and Actuators A, 8 (1985) 219.
8. J.W. Seto, J. Appl. Phys., 46 (1975) 5247.
9. N.C.C. Lu et al., IEEE Trans. ED-28, 7 (1981), 818.
10. E. Obermeier, Dr. Ing. Thesis, Technische Universität München, 1983.
11. M. Le Berre, M. Lemiti, D. Barbier, P. Pinard, J. Cali, E. Bustarret, J. Sicart and J.L. Robert, Sensors and Actuators A, 46-47 (1995) 166.
12. M. Mandurah et al., IEEE Trans. ED-28, 10 (1981) 1163.
13. N.C.C. Lu et al., IEEE Trans. ED-30, 2 (1983) 137.
14. D.P. Joshi and R.S. Srivastava, IEEE Trans. ED-31, 7 (1984) 920.
15. Y. Kanda. IEEE Trans. ED-29, 1 (1982) 64-70.
16. P. Kleimann, M. Le Berre, D. Barbier and P. Pinard, Mater. Res. Soc. Symp. Proc., 403 (1995).
17. W.P. Mason, Crystal Physics of Interaction Processes, 1966.
18. P.J. French and A.G.R. Evans, Electron. Lett. 20 (24) (1984) 999.
19. P.W. Chapman, O.N. Tufte and J.D. Long, J. Appl. Phys., 34 (1963) 3291.