Improved nanopositioning resolution through piezoresistive feedback control of a mems thermal actuator

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 74 DSC, Issue 2 PART B, 2005, Pages 1327-1334

  Messenger, Robert K ^a   McLain, Timothy W ^a   Howell, Larry L ^a  

^a Brigham Young University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ON-CHIP SENSING; PIEZORESISTIVE DISPLACEMENT SENSOR (PRDS); THERMOMECHANICAL IN-PLANE MICROACTUATOR (TIM);

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SENSORS;

FEEDBACK CONTROL;

EID: 33645655233     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81209     Document Type: Conference Paper

References (22)

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