Constrained thermal expansion micro-actuator

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 365-371

  Cragun, Rebecca ^a   Howell, Larry L ^a  

^a BRIGHAM YOUNG UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EQUIPMENT MANUFACTURE; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; NONLINEAR EQUATIONS; POLYCRYSTALLINE MATERIALS; SILICON; THERMAL EXPANSION;

COMPLIANT MECHANISM THEORY;

MICROACTUATORS;

EID: 0032287811     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)