Operating principles of an electrothermal vibromotor for optical switching applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 124-130

  Pai, Minfan ^a   Tien, Norman C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MICROMACHINING; MIRRORS; OPTICAL SWITCHES; SQUARE WAVE GENERATORS; STEPPING MOTORS; SWITCHING SYSTEMS;

ELECTROTHERMAL VIBROMOTOR; LOW VOLTAGE SQUARE WAVE SIGNAL; MICROMIRROR; POLYSILICON SURFACE MICROMACHINED; THERMAL ACTUATION;

MICROACTUATORS;

EID: 0033319790     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)