Position control of parallel-plate microactuators for probe-based data storage

Journal of Microelectromechanical Systems

Volumn 13, Issue 5, 2004, Pages 759-769

  Lu, Michael S C ^a   Fedder, Gary K ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; CMOS INTEGRATED CIRCUITS; CONTROL NONLINEARITIES; DAMPING; ELECTROSTATICS; MICROACTUATORS; MICROSENSORS; NATURAL FREQUENCIES; ROBUSTNESS (CONTROL SYSTEMS); SPURIOUS SIGNAL NOISE; SYSTEM STABILITY; VOLTAGE CONTROL;

CAPACITIVE SENSOR; CMOS-MEMS; ELECTROSTATIC PULL IN; NONLINEAR PLANT; UNSTABLE POLE;

MICROELECTROMECHANICAL DEVICES;

EID: 7244250408     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.835761     Document Type: Article

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