Piezoresistive feedback for improving transient response of MEMS thermal actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6174 I, Issue , 2006, Pages

  Messenger, Robert K ^a   McLain, Timothy W ^a   Howell, Larry L ^a  

^a BRIGHAM YOUNG UNIVERSITY   (United States)

Author keywords

Feedback control; MEMS; Nanopositioner; Piezoresistive sensors; Thermal microactuator

Indexed keywords

ACTUATORS; FEEDBACK CONTROL; FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; POLYSILICON;

MEMS; NANOPOSITIONERS; PIEZORESISTIVE SENSORS; THERMAL MICROACTUATORS;

PIEZOELECTRIC DEVICES;

EID: 33745947454     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.657954     Document Type: Conference Paper

References (17)

1. E. Lüder, "Polycrystalline silicon-based sensors," Sensors and Actuators 10, pp. 9-23, 1986.
2. H. Guckel, "Surface micromachined pressure transducers," Sensors and Actuators A 28, pp. 133-146, 1991.
3. P. French and A. Evans, "Polycrystalline silicon strain sensors," Sensors and Actuators 8, pp. 219-225, 1985.
4. N. Hubbard, M. Culpepper, and L. Howell, "Micropositioners and nanopositioners," accepted for publication in ASME Applied Mechanics Reviews, 2006.
5. S. Smith, D. Chetwynd, and S. Harb, "A simple two-axis ultraprecision actuator," Review of Scientific Instruments 65, pp. 910-917, 1994.
6. C. Lee and S. Kim, "An ultraprecision state for alignment of wafers in microlithography," Precision Engineering 21, pp.113-122, 1997.
7. D. Horsley, N. Wongkomet, R. Horowitz, and A. Pisano, "Precision positioning using a microfabricated electrostatic actuator," IEEE Transactions on Magnetics 35, pp. 993-999, 1999.
8. T. Imamura, M. Katayama, Y. Ikegawa, T. Ohwe, R. Koishi, and T. Koshikawa, "MEMS-based integrated head/actuator/slider for hard disk drives," IEEE/ASME Transactions on Mechatronics 3, pp. 166-174, 1988.
9. S. Hoen, Q. Bai, J. Harley, D. Horsley, F. Matta, T. Verhoeven, J. Williams, and K. Williams, "A high-performance dipole surface drive for large travel and force," Proc. of the International Conference on Solid State Sensors and Actuators 1, pp. 344-347, 2003.
10. Y. Liu and T. Higuchi, "Precision positioning device utilizing impact force of combined piezo-pneumatic actuator," IEEE/ASME Transactions on Mechatronics 6, pp. 467-473, 2001.
11. P. Cheung, R. Horowitz, and R. Howe, "Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator," IEEE Transactions on Magnetics 32, pp. 122-128, 1996.
12. S.-S. Ku, U. Pinsopon, S. Cetinkunt, and S. Nakajima, "Design, fabrication, and real-time neural network control of a three degree-of-freedom nanopositioner," IEEE/ASME Transactions on Mechatronics 5, pp. 273-280, 2000.
13. R. Yang, M. Jouaneh, and R. Schweizer, "Design and characterization of a low-profile micropositioning stage," Precision Engineering 18, pp. 20-29, 1996.
14. R. K. Messenger, "Modeling and control of surface micromachined thermal actuators," Master's thesis, Brigham Young University, Provo, Ut, 2004.
15. L. Lin and M. Chiao, "Electrothermal responses of lineshape microstructures," Sensors and Actuators 55, pp. 35-41, 1996.
16. C. Lott, T. W. McLain, J. N. Harb, and L. L. Howell, "Modeling the thermal behavior of a surfacemicromachined linear-displacement thermomechanical microactuator," Sensors and Actuators 101(1-2), pp. 239-250, 2002.
17. R. K. Messenger, T. W. McLain, and L. L. Howell, "Feedback control of a thermomechanical inplane microactuator using piezoresistive displacement sensing," ASME IMECE, Dynamic Systems and Control Division DCS 73(2), pp. 1301-1310, 2004.