Calibration technique for MEMS membrane type strain sensors

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1999, Pages 204-210

  Cao, Li ^a   Kim, Tae Song ^a   Zhou, Jia ^a   Mantell, Susan C ^a   Polla, Dennis L ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; PIEZOELECTRIC DEVICES; SEMICONDUCTOR DOPING; SENSITIVITY ANALYSIS; SENSORS; SILICON WAFERS; THIN FILMS;

PIEZORESISTIVE STRAIN SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032682868     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)