Lifetime studies of electrothermal bent-beam actuators in single-crystal silicon and polysilicon

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 498-506

  Chu, Larry L ^a,b   Que, Long ^a,c   Oliver, Andrew D ^d   Gianchandani, Yogesh B ^a  

^a The Department of Civil and Environmental Engineering   (United States)

^b Colibrys Inc ^*  (United States)

^c GE GLOBAL RESEARCH   (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Actuator; Electrothermal; In situ annealing; Lifetime; Micromachining; Polysilicon

Indexed keywords

MICROMACHINING; POLYSILICON; PROBES; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTROTHERMAL BENT-BEAM ACTUATORS; ELECTROTHERMAL BENT-BEAM MICROACTUATORS; IN SITU ANNEALING; SCANNING PROBE MICROSCOPY;

MICROACTUATORS;

EID: 33745149339     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876780     Document Type: Article

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