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Volumn 130, Issue 10, 2008, Pages

Experimental investigation on the heat transfer between a heated microcantilever and a substrate

Author keywords

Atomic force microscope; Heated microcantilever; Micro nanoscale heat transfer; Nanoscale thermometer

Indexed keywords

AIR; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; HEAT EXCHANGERS; HEAT TRANSFER; HEATING EQUIPMENT; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PLATINUM; SILICON; SILICON COMPOUNDS; SUBSTRATES; TEMPERATURE SENSORS; THERMOANALYSIS; THERMOMETERS;

EID: 56449098503     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2953238     Document Type: Article
Times cited : (46)

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