Experimental investigation on the heat transfer between a heated microcantilever and a substrate

Journal of Heat Transfer

Volumn 130, Issue 10, 2008, Pages

  Park, Keunhan ^a   Cross, Graham L W ^b   Zhang, Zhuomin M ^a   King, William P ^c  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b TRINITY COLLEGE DUBLIN   (Ireland)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

Atomic force microscope; Heated microcantilever; Micro nanoscale heat transfer; Nanoscale thermometer

Indexed keywords

AIR; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; HEAT EXCHANGERS; HEAT TRANSFER; HEATING EQUIPMENT; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PLATINUM; SILICON; SILICON COMPOUNDS; SUBSTRATES; TEMPERATURE SENSORS; THERMOANALYSIS; THERMOMETERS;

AIR GAPS; ATOMIC FORCE MICROSCOPE; BULK VALUES; EXPERIMENTAL INVESTIGATIONS; HEAT TRANSFER PROCESSES; HEATED CANTILEVERS; HEATED MICROCANTILEVER; MICRO CANTILEVERS; MICRO-/NANOSCALE HEAT TRANSFER; NANOSCALE TECHNOLOGIES; NANOSCALE THERMOMETER; RESISTANCE THERMOMETERS; SILICON SUBSTRATES; TEMPERATURE COEFFICIENT OF RESISTANCES; THERMAL CONDUCTANCES; TO MANY;

GALLIUM ALLOYS;

EID: 56449098503     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2953238     Document Type: Article

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