Topography imaging with a heated atomic force microscope cantilever in tapping mode

Review of Scientific Instruments

Volumn 78, Issue 4, 2007, Pages

  Park, Keunhan ^a   Lee, Jungchul ^a   Zhang, Zhuomin M ^a   King, William P ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; DIFFRACTION GRATINGS; IMAGING TECHNIQUES; NATURAL FREQUENCIES; SILICON; THERMAL EFFECTS; TOPOGRAPHY;

HEATED AFM CANTILEVERS; HEATERS; TEMPERATURE SIGNALS; THERMAL RESPONSES; THERMAL STEADY STATE;

CANTILEVER BEAMS;

ARTICLE; ATOMIC FORCE MICROSCOPY; CALIBRATION; HEAT; METHODOLOGY; STANDARD;

CALIBRATION; HEAT; MICROSCOPY, ATOMIC FORCE;

EID: 34247554485     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2721422     Document Type: Article

References (27)

1. G. Binnig and C. F. Quate, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.56.930 56, 930 (1986).
2. C. C. Williams and H. K. Wickramasinghe, Appl. Phys. Lett. 0003-6951 10.1063/1.97288 49, 1587 (1986).
3. G. Binnig, et al., Appl. Phys. Lett. 0003-6951 10.1063/1.123540 74, 1329 (1999).
4. B. W. Chui, T. D. Stowe, Y. S. Ju, K. E. Goodson, T. W. Kenny, H. J. Mamin, B. D. Terris, and R. P. Ried, J. Microelectromech. Syst. 1057-7157 10.1109/84.661386 7, 69 (1998).
5. W. P. King, et al., Appl. Phys. Lett. 0003-6951 10.1063/1.1351846 78, 1300 (2001).
6. P. Vettiger, et al., IEEE Trans. NanoTechnol. 1, 39 (2002). 1536-125X
7. B. Gotsmann and U. Dürig, Langmuir 0743-7463 10.1021/la036112w 20, 1495 (2004).
8. B. Gotsmann and U. Dürig, Appl. Phys. Lett. 0003-6951 10.1063/1.2128040 87, 194102 (2005).
9. W. P. King, S. Saxena, B. A. Nelson, R. Pitchimani, and B. L. Weeks, Nano Lett. 1530-6984 10.1021/nl061196p 6, 2145 (2006).
10. P. E. Sheehan, L. J. Whitman, W. P. King, and A. N. Brent, Appl. Phys. Lett. 0003-6951 10.1063/1.1785860 85, 1589 (2004).
11. B. A. Nelson, W. P. King, A. Laracuente, P. E. Sheehan, and L. J. Whitman, Appl. Phys. Lett. 0003-6951 10.1063/1.2164394 88, 033104 (2006).
12. M. Yang, P. E. Sheehan, W. P. King, and L. J. Whitman, J. Am. Chem. Soc. 128, 6774 (2006). 0002-7863
13. B. Gotsmann, U. Dürig, J. Frommer, and C. J. Hawker, Adv. Funct. Mater. 1616-301X 10.1002/adfm.200500724 16, 1499 (2006).
14. S. Bakbak, P. J. Leech, B. E. Carson, S. Saxena, W. P. King, and U. H. F. Bunz, Macromolecules 39, 6793 (2006). 0024-9297
15. W. P. King, T. W. Kenny, and K. E. Goodson, Appl. Phys. Lett. 0003-6951 10.1063/1.1787160 85, 2086 (2004).
16. W. P. King, J. Micromech. Microeng. 0960-1317 10.1088/0960-1317/15/12/028 15, 2441 (2005).
17. K. J. Kim, K. Park, J. Lee, Z. M. Zhang, and W. P. King, Sens. Actuators A. available online (DOI 10.1016/j.sna.2006.10.052) (2007). 0924-4247
18. J. H. Lee and Y. B. Gianchandani, Rev. Sci. Instrum. 0034-6748 10.1063/1.1711153 75, 1222 (2004).
19. Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 0021-8979 10.1063/1.338807 61, 4723 (1987).
20. Q. Zhong, D. Inniss, K. Kjoller, and V. B. Elings, Surf. Sci. 0039-6028 10.1016/0039-6028(93)90582-5 290, L688 (1993).
21. R. Garcia and R. Perez, Surf. Sci. Rep. 0167-5729 10.1016/S0167-5729(02) 00077-8 47, 197 (2002).
22. J. Lee, T. Beechem, T. L. Wright, B. A. Nelson, S. Graham, and W. P. King, J. Microelectromech. Syst. 1057-7157 10.1109/JMEMS.2006.886020 15, 1644 (2006).
23. B. W. Chui, M. Asheghi, Y. S. Ju, K. E. Goodson, T. W. Kenny, and H. J. Mamin, Microscale Thermophys. Eng. 1089-3954 10.1080/108939599199765 3, 217 (1999).
24. K. Park, J. Lee, Z. M. Zhang, and W. P. King, J. Microelectromech. Syst.. available online (DOI 10.1109/jmems.2006.889498) (2007).
25. T. Gotszalk, P. B. Grabiec, and I. W. Rangelow, Sens. Actuators, A 123-124, 370 (2005). 0924-4247
26. I. Shiraki, Y. Miyatake, T. Nagamura, and K. Miki, Rev. Sci. Instrum. 0034-6748 10.1063/1.2169469 77, 023705 (2006).
27. J. B. Xu, K. Lauger, R. Moller, K. Dransfeld, and I. H. Wilson, J. Appl. Phys. 0021-8979 10.1063/1.358001 76, 7209 (1994).