Low temperature characterization of heated microcantilevers

Journal of Applied Physics

Volumn 101, Issue 9, 2007, Pages

  Park, Keunhan ^a   Marchenkov, Alexei ^b   Zhang, Zhuomin M ^a   King, William P ^c  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYOGENICS; ELECTRIC RESISTANCE; HEATING; NEGATIVE TEMPERATURE COEFFICIENT; TEMPERATURE MEASUREMENT;

CANTILEVER HEATERS; CANTILEVER RESISTANCE; THERMAL CANTILEVER RESPONSES; THERMAL METROLOGY TOOLS;

NANOCANTILEVERS;

EID: 34248590796     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2720263     Document Type: Conference Paper

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