Design analysis of heated atomic force microscope cantilevers for nanotopography measurements

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2441-2448

  King, William P ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; CONCENTRATION (PROCESS); DOPING (ADDITIVES); ELECTRIC RESISTANCE; HEAT TRANSFER; MACHINE DESIGN; TEMPERATURE DISTRIBUTION;

CANTILEVERS; DOPING CONCENTRATION; HEAT GENERATION; NONLINEAR TEMPERATURE;

CANTILEVER BEAMS;

EID: 27944455145     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/028     Document Type: Article

References (21)

1. Binnig G, Quate C F and Gerber C 1986 Atomic force microscope Phys. Rev. Lett. 56 930-3
2. Vettiger P, Despont M, Drechsler U, Dürig U, Häberle W, Lutwyche M, Rothuizen H E, Stutz R, Widmer R and Binnig G 2000 The "millipede"-more than one thousand tips for future AFM data storage IBM J. Res. Dev. 44 323-40
3. Harley J A and Kenny T W 1999 High-sensitivity piezoresistive cantilevers under 1000 Angstrom thick Appl. Phys. Lett. 75 289-91
4. Thomas R C, Houston J E, Crooks R M, Kim T and Michalske T A 1995 Probing adhesion forces at the molecular scale J. Am. Chem. Soc. 117 3830-4
5. Vettiger P et al 2002 The "millipede"-nanotechnology entering data storage IEEE Trans. Nanotechnol. 1 39-55
6. Vettiger P, Despont M, Drechsler U, Durig U, Haberle W, Lutwyche M I, Rothuizen H E, Stutz R, Widmer R and Binnig G K 2000 The "millipede"- more than one thousand tips for future AFM data storage IBM J. Res. Dev. 44 323-40
7. King W P, Kenny T W and Goodson K E 2004 Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements Appl. Phys. Lett. 85 2086-8
8. King W P, Kenny T W, Goodson K E, Cross G, Despont M, Durig U, Rothuizen H, Binnig G K and Vettiger P 2001 Atomic force microscope cantilevers for combined thermomechanical data writing and reading Appl. Phys. Lett. 78 1300-2
9. King W P, Kenny T W, Goodson K E, Cross G L W, Despont M, Durig U, Rothuizen H, Binnig G and Vettiger P 2002 Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation J. Microelectromech. Syst. 11 765-74
10. Jaeger R C 2002 Introduction to Microelectronic Fabrication vol 5 2nd edn (Upper Saddle River, NJ: Prentice-Hall)
11. Chui B W, Stowe T D, Ju Y S, Goodson K E, Kenny T W, Mamin H J, Terris B D and Ried R P 1998 Low-stiffness silicon cantilever with integrated heaters and piezoresistive sensors for high-density data storage J. Microelectromech. Syst. 7 69-78
12. Sheehan P E, Whitman L J, King W P and Nelson B A 2004 Nanoscale deposition of solid inks via thermal dip pen nanolithography Appl. Phys. Lett. 85 1589-91
13. Nelson B A, King W P and Gall K 2005 Shape recovery of nanoscale imprints in a thermoset "shape memory" polymer Appl. Phys. Lett. 86 103108
14. Carslaw H S and Jaeger J C 1959 Conduction of Heat in Solids 2nd edn (Oxford: Clarendon)
15. Incropera F P and DeWitt D P 2002 Introduction to Heat Transfer 4th edn (New York: Wiley)
16. Reif F 1965 Fundamentals of Statistical and Thermal Physics (New York: McGraw-Hill)
17. Chui B W, Asheghi M, Ju Y S, Goodson K E, Kenny T W and Mamin H J 1999 Intrinsic-carrier thermal runaway in silicon microcantilevers Microscale Thermophys. Eng. 3 217-28
18. King W P, Kenny T W, Goodson K E, Cross G L W, Despont M, Durig U, Rothuizen H, Binnig G and Vettiger P 2001 Atomic Force microscope cantilevers for combined thermomechanical data writing and reading Appl. Phys. Lett. 78 1300-2
19. Masters N, Ye W and King W P 2005 The impact of sub-continuum gas conduction on the sensitivity of heated atomic force microscope cantilevers Phys. Fluids 17 100615
20. King W P, Kenny T W, Goodson K E, Despont M, Duerig U, Lantz M, Rothuizen H, Binnig G and Vettiger P 2002 Microcantilevers for thermal nanoimaging and thermomechanical surface modification Presented at Solid State Sensors and Actuators Workshop (Hilton Head, SC)
21. Despont M et al 2000 VLSI-NEMS chip for parallel AFM data storage Sensors Actuators A 80 100-7