Frequency-dependent electrical and thermal response of heated atomic force microscope cantilevers

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 213-222

  Park, Keunhan ^a   Lee, Jungchul ^a   Zhang, Zhuomin M ^a   King, William P ^a,b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Atomic force microscopy (AFM); Electric variables measurement; Frequency response; Raman spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC VARIABLES MEASUREMENT; FREQUENCY RESPONSE; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS; THERMAL VARIABLES MEASUREMENT;

CANTILEVERS; ELECTRICAL RESPONSE; THERMAL RESPONSE; VOLTAGE RESPONSE;

NANOCANTILEVERS;

EID: 34147123195     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.889498     Document Type: Article

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