The impact of subcontinuum gas conduction on topography measurement sensitivity using heated atomic force microscope cantilevers

Physics of Fluids

Volumn 17, Issue 10, 2005, Pages

  Masters, Nathan D ^a   Ye, Wenjing ^a   King, William P ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Argon; Atomic force microscopy; Finite difference methods; Heat conduction; Kinetic theory; Monte Carlo methods; Nanostructured materials; Sensitivity; Surface topography measurement

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; FINITE DIFFERENCE METHOD; KINETIC THEORY; MATHEMATICAL MODELS; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; SENSITIVITY ANALYSIS; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY;

MOLECULAR MODEL; SUBCONTINUUM GAS CONDUCTION; SURFACE TOPOGRAPHY MEASUREMENT;

HEAT CONDUCTION;

ARGON; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; FINITE DIFFERENCE METHOD; HEAT CONDUCTION; KINETIC THEORY; MATHEMATICAL MODELS; MONTE CARLO METHODS; NANOSTRUCTURED MATERIALS; SENSITIVITY ANALYSIS; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY;

EID: 27944491009     PISSN: 10706631     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1932313     Document Type: Article

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