Design and batch fabrication of probes for sub-100 nm scanning thermal microscopy

Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 370-378

  Shi, L ^a   Kwon, O ^a   Miner, A C ^a   Majumdar, A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Batch fabrication; Cantilever probes; Scanning thermal microscopy; Thermal design

Indexed keywords

COMPUTER SIMULATION; ETCHING; HEAT LOSSES; OPTICAL RESOLVING POWER; OPTIMIZATION; PROBES; SCANNING; SILICA; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY; WEAR OF MATERIALS;

BATCH FABRICATION; SCANNING THERMAL MICROSCOPY; THERMAL DESIGN; THIN FILM THERMOCOUPLE JUNCTION;

INFRARED IMAGING;

EID: 0035440479     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.946785     Document Type: Article

References (21)

1. Scanning thermal microscopy
2. Analysis of product hot electron problems by gated emission microscopy
3. Short-time-scale thermal mapping of microdevices using a scanning thermoreflectance technique
4. Sensor nanofabrication, performance, and conduction mechanisms in scanning thermal microscopy
5. Scanning near-field optical microscopy and scanning thermal microscopy
6. Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip
7. A thermal microprobe fabricated with wafer-stage processing
8. Scanning thermal microscopy using batch fabricated thermocouple probes
9. Microscale real temperature measurement by the AFM using thermal feedback method
10. Thermal design and batch fabrication of cantilever probes for scanning thermal microscopy
11. Thermal conductivity of thin metallic films and wires at cryogenic temperatures
12. Thermal transport mechanisms at nanoscale point contacts
13. Micromachined submicrometer photodiode for scanning probe microscopy
14. Quantitative thermal probing of devices at sub-100 nm resolution
15. Scanning thermal microscopy of carbon nanotubes using batch fabricated probes