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Volumn 49, Issue 9-10, 2006, Pages 1703-1718

Nanoscale radiation heat transfer for silicon at different doping levels

Author keywords

Doped silicon; Fluctuational electrodynamics; Microscale and nanoscale; Near field thermal radiation

Indexed keywords

CONCENTRATION (PROCESS); COOLING; ELECTRODYNAMICS; HEAT FLUX; HEATING; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

EID: 33645892567     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijheatmasstransfer.2005.09.037     Document Type: Article
Times cited : (305)

References (55)
  • 1
    • 33747109716 scopus 로고
    • Effect of small spacing on radiative transfer between two dielectrics
    • Cravalho E.G., Tien C.L., and Caren R.P. Effect of small spacing on radiative transfer between two dielectrics. J. Heat Transfer 89 (1967) 351-358
    • (1967) J. Heat Transfer , vol.89 , pp. 351-358
    • Cravalho, E.G.1    Tien, C.L.2    Caren, R.P.3
  • 4
    • 0037877300 scopus 로고    scopus 로고
    • Optical and thermal radiative properties of semiconductors related to micro/nanotechnology
    • Zhang Z.M., Fu C.J., and Zhu Q.Z. Optical and thermal radiative properties of semiconductors related to micro/nanotechnology. Adv. Heat Transfer 37 (2003) 179-296
    • (2003) Adv. Heat Transfer , vol.37 , pp. 179-296
    • Zhang, Z.M.1    Fu, C.J.2    Zhu, Q.Z.3
  • 5
    • 0033366403 scopus 로고    scopus 로고
    • Radiative exchange of heat between nanostructures
    • Pendry J.B. Radiative exchange of heat between nanostructures. J. Phys.: Condens. Matter 11 (1999) 6621-6633
    • (1999) J. Phys.: Condens. Matter , vol.11 , pp. 6621-6633
    • Pendry, J.B.1
  • 7
    • 0000316645 scopus 로고
    • Theory of radiative heat transfer between closely spaced bodies
    • Polder D., and Van Hove M. Theory of radiative heat transfer between closely spaced bodies. Phys. Rev. B 4 (1971) 3303-3314
    • (1971) Phys. Rev. B , vol.4 , pp. 3303-3314
    • Polder, D.1    Van Hove, M.2
  • 8
    • 1842633183 scopus 로고
    • Thermal radiation between closely spaced metal surfaces at low temperatures due to traveling and quasi-stationary components of the radiation field
    • Caren R.P. Thermal radiation between closely spaced metal surfaces at low temperatures due to traveling and quasi-stationary components of the radiation field. Int. J. Heat Mass Transfer 17 (1974) 755-765
    • (1974) Int. J. Heat Mass Transfer , vol.17 , pp. 755-765
    • Caren, R.P.1
  • 9
    • 0001660666 scopus 로고
    • Theory of heat transfer by evanescent waves
    • Loomis J.J., and Maris H.J. Theory of heat transfer by evanescent waves. Phys. Rev. B 50 (1994) 18517-18524
    • (1994) Phys. Rev. B , vol.50 , pp. 18517-18524
    • Loomis, J.J.1    Maris, H.J.2
  • 10
    • 0034894759 scopus 로고    scopus 로고
    • Radiative heat transfer between nanostructures
    • Volokitin A.I., and Persson B.N. Radiative heat transfer between nanostructures. Phys. Rev. B 63 (2001) 205404/1-205404/11
    • (2001) Phys. Rev. B , vol.63
    • Volokitin, A.I.1    Persson, B.N.2
  • 11
    • 0033900906 scopus 로고    scopus 로고
    • Very large radiative transfer over small distances from a black body for thermophotovoltaic applications
    • Pan J.L., Choy H.K.H., and Fonstad Jr. C.G. Very large radiative transfer over small distances from a black body for thermophotovoltaic applications. IEEE Trans. Electron Dev. 47 (2000) 241-249
    • (2000) IEEE Trans. Electron Dev. , vol.47 , pp. 241-249
    • Pan, J.L.1    Choy, H.K.H.2    Fonstad Jr., C.G.3
  • 12
    • 0036494389 scopus 로고    scopus 로고
    • Modeling and performance of microscale thermophotovoltaic energy conversion devices
    • Whale M.D., and Cravalho E.G. Modeling and performance of microscale thermophotovoltaic energy conversion devices. IEEE Trans. Energy Conver. 17 (2002) 130-142
    • (2002) IEEE Trans. Energy Conver. , vol.17 , pp. 130-142
    • Whale, M.D.1    Cravalho, E.G.2
  • 13
    • 0038048911 scopus 로고    scopus 로고
    • Surface modes for near field thermophotovoltaics
    • Narayanaswamy A., and Chen G. Surface modes for near field thermophotovoltaics. Appl. Phys. Lett. 82 (2003) 3544-3546
    • (2003) Appl. Phys. Lett. , vol.82 , pp. 3544-3546
    • Narayanaswamy, A.1    Chen, G.2
  • 15
    • 0001590019 scopus 로고
    • Heat transfer between two metallic surfaces at small distances
    • Xu J.-B., Lauger K., Moller R., Dransfeld K., and Wilso I.H. Heat transfer between two metallic surfaces at small distances. J. Appl. Phys. 76 (1994) 7209-7216
    • (1994) J. Appl. Phys. , vol.76 , pp. 7209-7216
    • Xu, J.-B.1    Lauger, K.2    Moller, R.3    Dransfeld, K.4    Wilso, I.H.5
  • 17
    • 0033301083 scopus 로고    scopus 로고
    • Scanning thermal microscopy
    • Majumdar A. Scanning thermal microscopy. Annu. Rev. Mater. Sci. 29 (1999) 505-585
    • (1999) Annu. Rev. Mater. Sci. , vol.29 , pp. 505-585
    • Majumdar, A.1
  • 18
    • 79957964241 scopus 로고    scopus 로고
    • Unusual photon tunneling in the presence of a layer with a negative refractive index
    • Zhang Z.M., and Fu C.J. Unusual photon tunneling in the presence of a layer with a negative refractive index. Appl. Phys. Lett. 80 (2002) 1097-1099
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 1097-1099
    • Zhang, Z.M.1    Fu, C.J.2
  • 19
    • 27644487591 scopus 로고    scopus 로고
    • Energy transmission by photon tunneling in multilayer structures including negative index materials
    • Fu C.J., Zhang Z.M., and Tanner D.B. Energy transmission by photon tunneling in multilayer structures including negative index materials. J. Heat Transfer 127 (2005) 1046-1052
    • (2005) J. Heat Transfer , vol.127 , pp. 1046-1052
    • Fu, C.J.1    Zhang, Z.M.2    Tanner, D.B.3
  • 20
    • 0035820936 scopus 로고    scopus 로고
    • Nanoscale radiative heat transfer between a small particle and a plane surface
    • Mulet J.-P., Joulian K., Carminati R., and Greffet J.-J. Nanoscale radiative heat transfer between a small particle and a plane surface. Appl. Phys. Lett. 78 (2001) 2931-2933
    • (2001) Appl. Phys. Lett. , vol.78 , pp. 2931-2933
    • Mulet, J.-P.1    Joulian, K.2    Carminati, R.3    Greffet, J.-J.4
  • 21
    • 1542373747 scopus 로고    scopus 로고
    • Resonant photon tunneling enhancement of the radiative heat transfer
    • Volokitin A.I., and Persson B.N. Resonant photon tunneling enhancement of the radiative heat transfer. Phys. Rev. B 69 (2004) 045417/1-045417/5
    • (2004) Phys. Rev. B , vol.69
    • Volokitin, A.I.1    Persson, B.N.2
  • 22
    • 2942691896 scopus 로고    scopus 로고
    • Engineering infrared emission properties of silicon in the near field and the far field
    • Marquier F., Joulain K., Mulet J.-P., Carminati R., and Greffet J.-J. Engineering infrared emission properties of silicon in the near field and the far field. Opt. Commun. 237 (2004) 379-388
    • (2004) Opt. Commun. , vol.237 , pp. 379-388
    • Marquier, F.1    Joulain, K.2    Mulet, J.-P.3    Carminati, R.4    Greffet, J.-J.5
  • 25
    • 0034250508 scopus 로고    scopus 로고
    • Near-field spectral effects due to electromagnetic surface excitations
    • Shchegrov A.V., Joulain K., Carminati R., and Greffet J.-J. Near-field spectral effects due to electromagnetic surface excitations. Phys. Rev. Lett. 85 (2000) 1548-1551
    • (2000) Phys. Rev. Lett. , vol.85 , pp. 1548-1551
    • Shchegrov, A.V.1    Joulain, K.2    Carminati, R.3    Greffet, J.-J.4
  • 26
    • 1042276627 scopus 로고    scopus 로고
    • Definition and measurement of the local density of states close to an interface
    • Joulian K., Carminati R., Mulet J.-P., and Greffet J.-J. Definition and measurement of the local density of states close to an interface. Phys. Rev. B 68 (2003) 245405/1-245405/10
    • (2003) Phys. Rev. B , vol.68
    • Joulian, K.1    Carminati, R.2    Mulet, J.-P.3    Greffet, J.-J.4
  • 27
    • 0142057378 scopus 로고    scopus 로고
    • Resonance photon tunneling enhancement of the van der Waals friction
    • Volokitin A.I., and Persson B.N.J. Resonance photon tunneling enhancement of the van der Waals friction. Phys. Rev. Lett. 91 (2003) 106101/1-106101/4
    • (2003) Phys. Rev. Lett. , vol.91
    • Volokitin, A.I.1    Persson, B.N.J.2
  • 28
    • 17644414249 scopus 로고    scopus 로고
    • Noncontact friction between nanostructures
    • Volokitin A.I., and Persson B.N.J. Noncontact friction between nanostructures. Phys. Rev. B 68 (2003) 155420/1-155420/12
    • (2003) Phys. Rev. B , vol.68
    • Volokitin, A.I.1    Persson, B.N.J.2
  • 29
    • 1942507518 scopus 로고    scopus 로고
    • Friction forces arising from fluctuating thermal fields
    • Zurita-Sanchez J.R., Greffet J.-J., and Novotny L. Friction forces arising from fluctuating thermal fields. Phys. Rev. A 69 (2004) 022902/1-022902/14
    • (2004) Phys. Rev. A , vol.69
    • Zurita-Sanchez, J.R.1    Greffet, J.-J.2    Novotny, L.3
  • 31
    • 17644371967 scopus 로고    scopus 로고
    • Surface electromagnetic waves thermally excited: radiative heat transfer, coherence properties and Casimir forces revisited in the near field
    • Joulain K., Mulet J.-P., Marquier F., Carminati R., and Greffet J.-J. Surface electromagnetic waves thermally excited: radiative heat transfer, coherence properties and Casimir forces revisited in the near field. Surf. Sci. Rep. 57 (2005) 59-112
    • (2005) Surf. Sci. Rep. , vol.57 , pp. 59-112
    • Joulain, K.1    Mulet, J.-P.2    Marquier, F.3    Carminati, R.4    Greffet, J.-J.5
  • 32
    • 84975542054 scopus 로고
    • New Green-function formalism for surface optics
    • Sipe J.E. New Green-function formalism for surface optics. J. Opt. Soc. Am. B 4 (1987) 481-489
    • (1987) J. Opt. Soc. Am. B , vol.4 , pp. 481-489
    • Sipe, J.E.1
  • 33
    • 0001815364 scopus 로고    scopus 로고
    • The thermal radiative properties of semiconductors
    • Roozeboom F. (Ed), Kluwer Academic Publishers, The Netherlands
    • Timans P.J. The thermal radiative properties of semiconductors. In: Roozeboom F. (Ed). Advances in Rapid Thermal and Integrated Processing (1996), Kluwer Academic Publishers, The Netherlands 35-101
    • (1996) Advances in Rapid Thermal and Integrated Processing , pp. 35-101
    • Timans, P.J.1
  • 35
    • 36149025905 scopus 로고
    • Determination of optical constants and carrier effective mass of semiconductors
    • Spitzer W.G., and Fan H.Y. Determination of optical constants and carrier effective mass of semiconductors. Phys. Rev. 106 (1957) 882-890
    • (1957) Phys. Rev. , vol.106 , pp. 882-890
    • Spitzer, W.G.1    Fan, H.Y.2
  • 36
    • 0012647061 scopus 로고
    • Polarized spectral emittance from periodic micromachined surfaces. II. Doped silicon: angular variation
    • Hesketh P.J., Zemel J.N., and Gebhart B. Polarized spectral emittance from periodic micromachined surfaces. II. Doped silicon: angular variation. Phys. Rev. B 37 (1988) 10803-10813
    • (1988) Phys. Rev. B , vol.37 , pp. 10803-10813
    • Hesketh, P.J.1    Zemel, J.N.2    Gebhart, B.3
  • 37
    • 5244266360 scopus 로고
    • Zero infrared reflectance anomaly in doped silicon lamellar gratings. I. From antireflection to total absorption
    • Auslender M., and Hava S. Zero infrared reflectance anomaly in doped silicon lamellar gratings. I. From antireflection to total absorption. Infrared Phys. Technol. 36 (1995) 1077-1088
    • (1995) Infrared Phys. Technol. , vol.36 , pp. 1077-1088
    • Auslender, M.1    Hava, S.2
  • 38
    • 33645848704 scopus 로고    scopus 로고
    • J.P. Hebb, Pattern effects in rapid thermal processing, Ph.D. Dissertation, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 1997.
  • 39
    • 84953655029 scopus 로고
    • Refractive index of silicon and germanium and its wavelength and temperature derivatives
    • Li H.H. Refractive index of silicon and germanium and its wavelength and temperature derivatives. J. Phys. Chem. Ref. Data 9 (1980) 561-658
    • (1980) J. Phys. Chem. Ref. Data , vol.9 , pp. 561-658
    • Li, H.H.1
  • 40
    • 13144257811 scopus 로고    scopus 로고
    • Modeling radiative properties of silicon with coatings and comparison with reflectance measurements
    • Lee B.J., Zhang Z.M., Early E.A., DeWitt D.P., and Tsai B.K. Modeling radiative properties of silicon with coatings and comparison with reflectance measurements. J. Thermophys. Heat Transfer 19 (2005) 558-569
    • (2005) J. Thermophys. Heat Transfer , vol.19 , pp. 558-569
    • Lee, B.J.1    Zhang, Z.M.2    Early, E.A.3    DeWitt, D.P.4    Tsai, B.K.5
  • 41
    • 0001319837 scopus 로고
    • Emissivity of silicon at elevated temperature
    • Timans P.J. Emissivity of silicon at elevated temperature. J. Appl. Phys. 74 (1993) 6353-6364
    • (1993) J. Appl. Phys. , vol.74 , pp. 6353-6364
    • Timans, P.J.1
  • 43
    • 84940849063 scopus 로고    scopus 로고
    • Silicon (Si)
    • Palik E.D. (Ed), Academic Press, New York
    • Edwards D.F. Silicon (Si). In: Palik E.D. (Ed). Handbook of Optical Constants of Solids vol. 1 (1998), Academic Press, New York 547-570
    • (1998) Handbook of Optical Constants of Solids , vol.1 , pp. 547-570
    • Edwards, D.F.1
  • 45
    • 0346658116 scopus 로고
    • Electrical properties of silicon containing arsenic and boron
    • Morin F.J., and Maita J.P. Electrical properties of silicon containing arsenic and boron. Phys. Rev. 96 (1954) 28-35
    • (1954) Phys. Rev. , vol.96 , pp. 28-35
    • Morin, F.J.1    Maita, J.P.2
  • 46
    • 11644283839 scopus 로고
    • Influence of temperature and backside roughness on the emissivity of Si wafers during rapid thermal processing
    • Vandenabeele P., and Maex K. Influence of temperature and backside roughness on the emissivity of Si wafers during rapid thermal processing. J. Appl. Phys. 72 (1992) 5867-5875
    • (1992) J. Appl. Phys. , vol.72 , pp. 5867-5875
    • Vandenabeele, P.1    Maex, K.2
  • 47
    • 0000008471 scopus 로고    scopus 로고
    • Infrared absorption in silicon at elevated temperatures
    • Rogne H., Timans P.J., and Ahmed H. Infrared absorption in silicon at elevated temperatures. Appl. Phys. Lett. 69 (1996) 2190-2193
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 2190-2193
    • Rogne, H.1    Timans, P.J.2    Ahmed, H.3
  • 48
    • 0026686001 scopus 로고
    • Silicon temperature measurement by infrared absorption: fundamental processes and doping effects
    • Sturm J.C., and Reaves C.M. Silicon temperature measurement by infrared absorption: fundamental processes and doping effects. IEEE Trans. Electron Dev. 39 (1992) 81-88
    • (1992) IEEE Trans. Electron Dev. , vol.39 , pp. 81-88
    • Sturm, J.C.1    Reaves, C.M.2
  • 49
    • 0016543933 scopus 로고
    • The standard thermodynamic functions for the formation of electrons and holes in Ge, Si, GaAs, and GaP
    • Thurmond C.D. The standard thermodynamic functions for the formation of electrons and holes in Ge, Si, GaAs, and GaP. J. Electrochem. Soc.: Solid State Sci. Technol. 122 (1975) 1133-1141
    • (1975) J. Electrochem. Soc.: Solid State Sci. Technol. , vol.122 , pp. 1133-1141
    • Thurmond, C.D.1
  • 51
    • 33645866117 scopus 로고
    • A method for calculating the Fermi energy and carrier concentrations in semiconductors
    • Gaylord T.K., and Linxwiler Jr. J.N. A method for calculating the Fermi energy and carrier concentrations in semiconductors. Am. J. Phys. 44 (1976) 353-356
    • (1976) Am. J. Phys. , vol.44 , pp. 353-356
    • Gaylord, T.K.1    Linxwiler Jr., J.N.2


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