High-speed, sub-15 nm feature size thermochemical nanolithography

Nano Letters

Volumn 7, Issue 4, 2007, Pages 1064-1069

  Szoszkiewicz, Robert ^a   Okada, Takashi ^a   Jones, Simon C ^a   Li, Tai De ^a   King, William P ^b   Marder, Seth R ^a   Riedo, Elisa ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROPHOBIC POLYMERS; MATERIALS SYSTEMS; NANOLITHOGRAPHY TECHNIQUES; SIMULTANEOUS DIRECT CONTROL;

ATOMIC FORCE MICROSCOPY; CONTROL THEORY; HYDROPHILICITY; HYDROPHOBICITY; NANOLITHOGRAPHY; POLYMER FILMS; THERMOCHEMISTRY;

THIN FILMS;

LITHOGRAPHY; THIN FILMS;

NANOMATERIAL;

ARTICLE; ARTIFICIAL MEMBRANE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; HEAT; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; SURFACE PROPERTY; TIME; ULTRASTRUCTURE;

CRYSTALLIZATION; HEAT; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; MICROSCOPY, ATOMIC FORCE; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; SURFACE PROPERTIES; TIME FACTORS;

EID: 34248231173     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl070300f     Document Type: Article

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