Thermal conduction from microcantilever heaters in partial vacuum

Journal of Applied Physics

Volumn 101, Issue 1, 2007, Pages

  Lee, Jungchul ^a   Wright, Tanya L ^a   Abel, Mark R ^a   Sunden, Erik O ^a   Marchenkov, Alexei ^b   Graham, Samuel ^a   King, William P ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER HEATERS; THERMAL SENSORS; THERMAL TRANSPORT;

ACTUATORS; HEATING EQUIPMENT; PRESSURE EFFECTS; VACUUM;

THERMAL CONDUCTIVITY;

EID: 33846272764     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2403862     Document Type: Article

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