Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy

IEEE Transactions on Plasma Science

Volumn 27, Issue 1, 1999, Pages 72-73

  Mahony, C M O ^a   Graham, W G ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRODES; EMISSION SPECTROSCOPY; FREQUENCIES; IMAGING TECHNIQUES; SPECTROSCOPY;

COUPLED RADIO FREQUENCY PLASMAS; GASEOUS ELECTRONICS CONFERENCE; OPTICAL SPECTROSCOPY; PLASMA MEASUREMENT; POWER MEASUREMENT; RADIO FREQUENCY DISCHARGES;

PLASMA HEATING;

EID: 0032653158     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.763043     Document Type: Article

References (5)

1. C. M. O. Mahony, R. Al. Wazzan, and W. G. Graham, "Sheath dynamics observed in a 13.56 MHz-driven plasma," Appl. Phys. Lett. vol. 71, no. 5, pp. 608-610, 1997.
2. P. J. Hargis Jr. et al., "The GEC RF reference reactor: A parallel-plate radio frequency system to study plasma processing discharges," Rev. Sci. Instrum., vol. 65, no. 1, pp. 140-154, 1994.
3. V. A. Godyak and R. B. Piejak, "Abnormally low electron energy and heating-mode transition in a low-pressure argon RF discharge at 13.56 MHz," Phys. Rev. Lett., vol. 65, no. 8, pp. 996-999, 1990.
4. M. M Turner, "Pressure heating of electrons in capacitively-coupled RF discharges," Phys. Rev. Lett., vol. 75, no. 7, pp. 1312-1315, 1995.
5. C. M. O. Mahony and W. G. Graham, "Correlation of time resolved optical and electrical measurements in capacitive RF discharges," unpublished.