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Volumn 16, Issue 2, 2007, Pages 330-336
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Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
ELECTRIC DISCHARGES;
PLASMAS;
ARGON DISCHARGE;
FREQUENCY COMPONENT;
LOW FREQUENCY CURRENT;
SHEATH MODEL;
ARGON;
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EID: 34247549718
PISSN: 09630252
EISSN: 13616595
Source Type: Journal
DOI: 10.1088/0963-0252/16/2/016 Document Type: Article |
Times cited : (14)
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References (18)
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