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Volumn 16, Issue 2, 2007, Pages 330-336

Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC DISCHARGES; PLASMAS;

EID: 34247549718     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/2/016     Document Type: Article
Times cited : (14)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.